Gas sensor array having shared field effect transistor

    公开(公告)号:US11921080B2

    公开(公告)日:2024-03-05

    申请号:US17139517

    申请日:2020-12-31

    CPC classification number: G01N27/4141

    Abstract: The gas sensor according to an exemplary embodiment of the present invention comprises: an FET device including one or more gate electrodes; a sensor array part including a plurality of sensors, in which a first electrode of each sensor is connected to at least one gate electrode of the plurality of gate electrodes in the FET device; and a controller detecting a gas using a current between a drain-source in response to voltage changes in the gate electrode of the FET device, wherein each sensor includes: a first electrode connected to a gate electrode of the FET device; a second electrode receiving an operating voltage through a switch controlled by the controller; and a detection film interposed between the first electrode and the second electrode.

    FLEXIBLE TACTILE SENSOR AND METHOD FOR MANUFACTURING THE SAME

    公开(公告)号:US20180172527A1

    公开(公告)日:2018-06-21

    申请号:US15891259

    申请日:2018-02-07

    Abstract: Provided are a flexible tactile sensor and a method for manufacturing the same. The flexible tactile sensor includes a polymer layer, a first metal layer formed over the polymer layer and a first sensor layer formed over the first metal layer, the first sensor layer comprising a strain gauge configured to change its resistance according to a first strain and a metal wire connected to the strain gauge. The flexible tactile sensor also includes a first cover layer configured to protect the first sensor layer, a second metal layer formed under the polymer layer, a second sensor layer formed under the second metal layer. The second sensor layer includes a strain gauge configured to change its resistance according to a second strain and a metal wire connected to the strain gauge of the second metal layer and a second cover layer configured to protect the second sensor layer.

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