Method for automatic correction of astigmatism

    公开(公告)号:US09928989B2

    公开(公告)日:2018-03-27

    申请号:US15620942

    申请日:2017-06-13

    CPC classification number: H01J37/153 H01J37/26 H01J2237/1532 H01J2237/223

    Abstract: The method is for automatic astigmatism correction of a lens system. A first image of a first frequency spectrum in a microscope is provided. The first image of a view is not in focus. The first image is then imaged. A first roundness measure of a distribution and directions of intensities in the first image is determined. The lens is changed to a second stigmator setting to provide a second image of a second frequency spectrum. The second image of the view is not in focus. The second image is the same view as the first image of the view at the first stigmator setting. A second roundness measure of a distribution and directions of intensities in the second image is determined. The first roundness measure is compared with the second roundness measure. The image with the roundness measure indicating the roundest distribution is selected.

    METHOD FOR AUTOMATIC CORRECTION OF ASTIGMATISM
    12.
    发明申请
    METHOD FOR AUTOMATIC CORRECTION OF ASTIGMATISM 有权
    自动校正方法

    公开(公告)号:US20170018396A1

    公开(公告)日:2017-01-19

    申请号:US15124099

    申请日:2015-06-17

    CPC classification number: H01J37/153 H01J2237/1532 H01J2237/223

    Abstract: The method is for automatic astigmatism correction of a lens system. A first image is provided that is not in focus at a first stigmator setting of a set of lenses. A calculating device calculates a corresponding first Fourier spectrum image. A distribution and direction of pixels of the Fourier spectrum image are determined by calculating a first vector and a second vector. The first vector is compared with the second vector. The lens system is changed from a first stigmator setting to a second stigmator setting to provide a second image. A corresponding Fourier spectrum image is calculated. The distribution and direction of pixels of the second Fourier spectrum image is determined by calculating a third vector and a fourth vector. The third vector is compared to the fourth vector. The image that has the lowest vector ratio is selected.

    Abstract translation: 该方法用于透镜系统的自动散光校正。 提供在一组透镜的第一施放器设置处不聚焦的第一图像。 计算装置计算对应的第一傅立叶光谱图像。 通过计算第一矢量和第二矢量来确定傅里叶谱图像的像素的分布和方向。 将第一个向量与第二个向量进行比较。 透镜系统从第一施放器设置改变为第二施放器设置以提供第二图像。 计算相应的傅立叶光谱图像。 通过计算第三矢量和第四矢量来确定第二傅立叶光谱图像的像素的分布和方向。 将第三个向量与第四个向量进行比较。 选择具有最低矢量比的图像。

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