公开(公告)号：US20160064187A1

公开(公告)日：2016-03-03

申请号：US14833563

申请日：2015-08-24

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Satoshi TOMIMATSU ,  Makoto SATO ,  Atsushi UEMOTO ,  Tatsuya ASAHATA ,  Yo YAMAMOTO

IPC: H01J37/302 ,  H01J37/20

CPC classification number: H01J37/3023 ,  H01J37/20 ,  H01J2237/208 ,  H01J2237/31745

Abstract: ProblemTo automatically repeat an operation of extracting and transferring a sample piece, which is formed by processing a sample using an ion beam, to a sample piece holder.SolutionA charged particle beam includes: a computer that controls a needle actuating mechanism so as to approach a needle to a sample piece using a template formed from an absorbed current image obtained by irradiating the needle with a charged particle beam and a tip coordinate of the needle acquired from a secondary electron image obtained by irradiating the needle with the charged particle beam.

Abstract translation: 问题为了自动重复将通过使用离子束处理样品而形成的样品的提取和转印操作重复到样品片保持器。 解决方案带电粒子束包括：计算机，其使用由通过用带电粒子束照射针而获得的吸收的当前图像形成的模板来控制针致动机构以使针接近样本片，并且将针 从通过用带电粒子束照射针获得的二次电子图像获取针。