公开(公告)号：US20230184799A1

公开(公告)日：2023-06-15

申请号：US17924488

申请日：2021-02-15

Applicant: Hitachi High-Tech Corporation

Inventor： Takeshi TAMAKOSHI ,  Satoru KANEKO ,  Hiroyuki KOBAYASHI ,  Yasuaki AOYAMA ,  Ryosuke HOSHI

IPC: G01N35/04

CPC classification number: G01N35/04 ,  G01N2035/0477 ,  G01N2035/0491

Abstract: A transport device includes: a calculation unit 40 configured to estimate a position of a transport container 20 based on a current value detected by a current detection unit 30; and a storage unit 45 configured to store a current change amount for each of a plurality of magnetic poles 25 when a pulse voltage of a fixed value is applied to respective coils 21 of the plurality of magnetic poles 25 in a state where a permanent magnetic 10 is not on a transport surface. The calculation unit 40 estimates the position of the transport container 20 based on a deviation between a current change amount of a coil 21 acquired at a time of detecting the position of the transport container 20 and the current change amount of the corresponding coil 21 in the state where the permanent magnetic 10 is not present, which is stored in the storage unit 45. This configuration provides a transport device capable of detecting a position of a sample transport carrier with high sensitivity without using a container carrier detection device, and an analysis system including the transport device.

公开(公告)号：US20240094234A1

公开(公告)日：2024-03-21

申请号：US18266662

申请日：2021-11-10

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroyuki KOBAYASHI ,  Satoru KANEKO ,  Takahiro SUZUKI ,  Yasuaki AOYAMA ,  Ryosuke HOSHI ,  Hiroshi WATANABE ,  Shinji AZUMA

IPC: G01N35/04

CPC classification number: G01N35/04 ,  G01N2035/0406 ,  G01N2035/0477

Abstract: The present invention controls liquid shaking during transportation while maintaining high-precision with respect to the stopping position of a specimen at the time of device start-up. This specimen carrying device includes a plurality of coils that transport a transportation container of a specimen, a coil drive unit, and a control unit, wherein: the control unit includes a liquid shaking determination unit that determines liquid shaking of the specimen from a velocity fluctuation of the specimen; the control unit sets, near a stopping coil 3 that is nearest to the stopping position of the specimen, a first section S1 on a side separated from the stopping coil 3 and a second section S2 on a side nearer to the stopping coil 3 than the first section S1, and sets a first current as a current that energizes the stopping coil 3 when the specimen is in the first section S1 and a second current as a current that energizes the stopping coil 3 when the specimen is in the second section S2; and the first current is set, on the basis of determination information of the liquid shaking determination unit 65, to a magnitude whereby the liquid shaking of the specimen is controlled, and the second current is set to a current value larger than that of the first current.

公开(公告)号：US20230365354A1

公开(公告)日：2023-11-16

申请号：US18029398

申请日：2021-08-25

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Ryosuke HOSHI ,  Yasuaki AOYAMA ,  Satoru KANEKO ,  Hiroyuki KOBAYASHI ,  Hiroshi WATANABE ,  Shinji AZUMA ,  Kuniaki ONIZAWA

IPC: B65G54/02 ,  H01F7/20 ,  G01N35/04 ,  B65G43/00

CPC classification number: B65G54/02 ,  H01F7/206 ,  G01N35/04 ,  B65G43/00 ,  G01N2035/0477

Abstract: An objective of the present invention is to provide a conveyance device that can increase inductance variation while suppressing the lowering of thrust. A conveyance device 1 conveys an article 110 to be conveyed. The article 110 to be conveyed can be conveyed by a magnetic force. The conveyance device 1 comprises a plurality of electromagnets 25a and 25b. Each electromagnet 25a, 25b comprises: teeth 22, 22a, 22b, 22c and 22e including a magnetic body; and windings 21, 21a and 21b wound around the teeth 22, 22a, 22b, 22c and 22e. The conveyance device 1 comprises a yoke 26 for magnetically coupling the electromagnets 25a and 25b, and driving circuits 50a and 50b for supplying current to the windings 21, 21a and 21b. The teeth 22, 22a, 22b, 22c and 22e have a cavity 27 extending in the axial direction.

公开(公告)号：US20230138212A1

公开(公告)日：2023-05-04

申请号：US17798682

申请日：2020-11-10

Applicant: Hitachi High-Tech Corporation

Inventor： Yasuaki AOYAMA ,  Ryosuke HOSHI ,  Satoru KANEKO ,  Hiroyuki KOBAYASHI ,  Takeshi TAMAKOSHI ,  Hiroshi WATANABE ,  Katsuhiro KAMBARA ,  Kuniaki ONIZAWA

IPC: G01N35/04 ,  B65G54/02

Abstract: The present invention provides a transport device and a specimen analysis system including the transport device that reduce the pulsation of thrust for moving an object to be transported, reduce vibration of the object to be transported during transport, and realize stable transport. The transport device of the present invention includes a first electromagnet unit including a first tooth made of a magnetic body, a first core connected to the first tooth and made of a magnetic body, and a first winding formed around the first core; a second electromagnet unit including a second tooth installed adjacent to the first electromagnet unit and made of a magnetic body, a second core connected to the second tooth and made of a magnetic body, a second winding formed around the second core; and a magnetic coupling unit made of a magnetic body between the first tooth of the first electromagnet unit and the second tooth of the second electromagnet unit.

公开(公告)号：US20220306405A1

公开(公告)日：2022-09-29

申请号：US17596305

申请日：2020-04-07

Applicant: Hitachi High-Tech Corporation

Inventor： Yasuaki AOYAMA ,  Ryosuke HOSHI ,  Satoru KANEKO ,  Hiroyuki KOBAYASHI ,  Takeshi TAMAKOSHI ,  Katsuhiro KAMBARA ,  Hiroshi WATANABE ,  Kuniaki ONIZAWA

IPC: B65G54/02

Abstract: Provided is a transport device in which reliability is increased by suppressing deterioration of the transport surface and transport efficiency is increased by suppressing electrical current loss. A transport device 1 comprising a transported body having either a permanent magnet 10 or a magnetic body, and an electromagnet unit in which coils 21 are wound around teeth 25 comprising magnetic bodies, and having recesses on surfaces of the teeth 25 facing the transported body. Specifically, the surfaces of the teeth 25 facing the transported body have at least two surfaces (first facing surface 22, second facing surface 23, etc.) which have different distances to the transported body.

公开(公告)号：US20220274792A1

公开(公告)日：2022-09-01

申请号：US17761845

申请日：2020-09-07

Applicant: Hitachi High-Tech Corporation

Inventor： Takeshi TAMAKOSHI ,  Yasuaki AOYAMA ,  Satoru KANEKO ,  Hiroyuki KOBAYASHI ,  Ryosuke HOSHI ,  Hiroshi WATANABE ,  Katsuhiro KAMBARA ,  Kuniaki ONIZAWA

IPC: B65G54/02 ,  G01N35/04

Abstract: A conveying device conveys a container including a magnetic body to a target position along a conveyance path and includes a conveyance surface configured by arranging a plurality of magnetic poles including a core and a coil, and including a conveyance path, a drive unit supplying a current to the coil, and a position detection unit estimating the position of the container. The position detection unit excites a first magnetic pole to detect the position of the container and applies a voltage to at least one second magnetic pole that is peripheral in a predetermined range from the first magnetic pole and is different from the first magnetic pole in a direction in which the polarity becomes opposite to the exciting current of the first magnetic pole, and a process of estimating the position of the container based on the current value of the first magnetic pole.

公开(公告)号：US20220252628A1

公开(公告)日：2022-08-11

申请号：US17616355

申请日：2020-04-14

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Takeshi TAMAKOSHI ,  Satoru KANEKO ,  Yasuaki AOYAMA ,  Hiroyuki KOBAYASHI ,  Ryosuke HOSHI ,  Hiroshi WATANABE ,  Katsuhiro KAMBARA ,  Kuniaki ONIZAWA

IPC: G01N35/04 ,  B65G54/02 ,  H02P25/064 ,  H02K11/215 ,  H02K41/03

Abstract: A conveying device detects an abnormality due to a change in the surface state of the conveying plane. The conveying device has a conveying plane for conveying thereabove a conveying container equipped with a magnetic body, a position detection unit for detecting the position of the conveying container above the conveying plane, a magnetic pole disposed below the conveying plane and equipped with a core and a coil, a drive unit for applying a voltage to the magnetic pole, and a calculation unit for controlling the drive unit. The calculation unit calculates the conveying speed of the conveying container on the basis of the position of the conveying container above the conveying plane and the time at which the conveying container passes through the position, and detects the surface state of the conveying plane on the basis of the calculated conveying speed of the conveying container.

公开(公告)号：US20220144556A1

公开(公告)日：2022-05-12

申请号：US17434945

申请日：2020-01-14

Applicant: Hitachi High-Tech Corporation

Inventor： Yasuaki AOYAMA ,  Ryosuke HOSHI ,  Hiroyuki KOBAYASHI ,  Satoru KANEKO ,  Takeshi TAMAKOSHI ,  Hiroshi WATANABE ,  Katsuhiro KAMBARA ,  Kuniaki ONIZAWA

IPC: B65G43/00 ,  H02P29/00 ,  B65G23/00

Abstract: The invention provides a conveying device having a conveying performance higher than that of the related art, a sample analysis system and sample pretreatment device with the conveying device and a method for conveying a conveyance object. A conveying device 1 includes a permanent magnet 10 which is provided on a sample rack 111 side, magnetic poles 25 each of which includes a core 22 made of a second magnetic body and a winding 21 wound around an outer periphery of the core 22, drive circuits 50 each of which supplies a current to the winding 21 of the magnetic pole 25, and current command calculation units 55 each of which controls a value of the current to be supplied to the winding 21 from the drive circuit 50. The current command calculation unit 55 makes the currents to be supplied to the windings 21 vary.

公开(公告)号：US20200328099A1

公开(公告)日：2020-10-15

申请号：US16913010

申请日：2020-06-26

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Hiroyuki KOBAYASHI ,  Nobuya MIYOSHI ,  Kazunori SHINODA ,  Tatehito USUI ,  Naoyuki KOFUJI ,  Yutaka KOUZUMA ,  Tomoyuki WATANABE ,  Kenetsu YOKOGAWA ,  Satoshi SAKAI ,  Masaru IZAWA

IPC: H01L21/67 ,  H01J37/32

Abstract: A plasma processing apparatus includes a stage disposed in a processing chamber for mounting a wafer, a plasma generation chamber disposed above the processing chamber for plasma generation using process gas, a plate member having multiple introduction holes, made of a dielectric material, disposed above the stage and between the processing chamber and the plasma generation chamber, and a lamp disposed around the plate member for heating the wafer. The plasma processing apparatus further includes an external IR light source, an emission fiber arranged in the stage, that outputs IR light from the external IR light source toward a wafer bottom, and a light collection fiber for collecting IR light from the wafer. Data obtained using only IR light from the lamp is subtracted from data obtained also using IR light from the external IR light source during heating of the wafer. Thus, a wafer temperature is determined.