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公开(公告)号:US20240302292A1
公开(公告)日:2024-09-12
申请号:US18664848
申请日:2024-05-15
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Tomonori NAKAMURA , Kenichiro IKEMURA
IPC: G01N21/956 , G01B11/27 , G01N21/64
CPC classification number: G01N21/956 , G01B11/272 , G01N21/64 , G01N2021/95638
Abstract: An inspection apparatus includes a light source unit, cameras, a keyboard, and a controller that determines a wavelength of the excitation light, based on the information on the emission color received by the keyboard, and that controls the light source unit so that the light source unit generates excitation light with the determined wavelength. The controller determines a wavelength longer than an absorption edge wavelength of the substrate of the sample and shorter than a peak wavelength of an emission spectrum of the light-emitting element, the peak wavelength being specified from the information on the emission color, to be the wavelength of the excitation light.
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公开(公告)号:US20230324550A1
公开(公告)日:2023-10-12
申请号:US18104326
申请日:2023-02-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Tomonori NAKAMURA , Kenichiro IKEMURA , Koji TAKAHASHI , Yasunori IGASAKI
CPC classification number: G01S17/32 , G01S7/4808 , G01S7/4811
Abstract: A device includes a signal generation unit that generates a first signal having a first repetition frequency and a second signal having a second repetition frequency higher than the first repetition frequency, a light source unit that generates light whose wavelength is modulated with time through internal modulation based on the first signal, a modulation unit that further modulates, with time, the wavelength of the light using a Doppler effect through external modulation based on the second signal, a splitting unit that divides the light output from the modulation unit into measurement light and reference light, an irradiation unit that irradiates a target object with the measurement light, a detection unit that detects interference light between reflected light from the target object and the reference light, and a calculation unit that calculates a distance to the target object on the basis of an output signal from the detection unit.
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公开(公告)号:US20230324520A1
公开(公告)日:2023-10-12
申请号:US18104340
申请日:2023-02-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Tomonori NAKAMURA , Kenichiro IKEMURA
CPC classification number: G01S7/4817 , G01S17/34
Abstract: A light source device includes a light source that generates continuous light, a retroreflective material that retroreflects a light beam from the light source, an optical system that guides the light beam from the light source to the retroreflective material and output the light beam retroreflected from the retroreflective material to the outside, and a modulation unit that is disposed in the optical system, changes an optical path length between the light source and the retroreflective material with time, and changes a wavelength of the light beam with time using a Doppler effect.
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