公开(公告)号：US20230061530A1

公开(公告)日：2023-03-02

申请号：US18053732

申请日：2022-11-08

Applicant: Gigaphoton Inc.

Inventor： Hitoshi OHGA ,  Shinichi MATSUMOTO ,  Hirotaka MIYAMOTO

IPC: H01S3/00

Abstract: A pulse width extension device includes a first delay optical system having a first loop optical path formed on a first plane and configured by a first beam splitter and a plurality of first concave mirrors, a second delay optical system having a second loop optical path formed on a second plane parallel to and different from the first plane and configured by a second beam splitter and a plurality of second concave mirrors, and a first beam rotation mechanism arranged on an optical path between the first delay optical system and the second delay optical system and configured to rotate a beam of pulse laser light having passed through the first delay optical system so that a longitudinal direction of a beam cross-sectional shape of the pulse laser light traveling on the second loop optical path is perpendicular to the second plane.

公开(公告)号：US20230022170A1

公开(公告)日：2023-01-26

申请号：US17938246

申请日：2022-10-05

Applicant: Gigaphoton Inc.

Inventor： Hirotaka MIYAMOTO

IPC: H01S3/00 ,  H01S3/225 ,  H01S3/23

Abstract: A laser apparatus according to an aspect of the present disclosure includes a laser oscillator configured to emit a pulse laser beam, and a first optical pulse stretcher, a second optical pulse stretcher, and a third optical pulse stretcher that are disposed on an optical path of the pulse laser beam. When L1 represents an optical path length of a delay optical path of the first optical pulse stretcher, L2 represents an optical path length of a delay optical path of the second optical pulse stretcher, L3 represents an optical path length of a delay optical path of the third optical pulse stretcher, and n represents an integer equal to or larger than two, L2 is an integral multiple of L1 by an integer equal to or larger than two and L3 satisfies the following condition: (n−0.75)×L1≤L3≤(n−0.25)×L1.

公开(公告)号：US20210367396A1

公开(公告)日：2021-11-25

申请号：US17398084

申请日：2021-08-10

Applicant: Gigaphoton Inc.

Inventor： Hirotaka MIYAMOTO ,  Takuma YAMANAKA ,  Miwa IGARASHI

IPC: H01S3/13 ,  H01S3/038 ,  H01S3/137 ,  H01S3/08 ,  G03F7/20

Abstract: A laser apparatus includes an output coupling mirror; a grating that constitutes an optical resonator together with the output coupling mirror; a laser chamber in an optical path of the optical resonator; at least one prism in an optical path between the laser chamber and the grating; a rotary stage including an actuator that rotates the prism to change an incident angle of a laser beam from the laser chamber on the grating; a wavelength measuring unit that measures a central wavelength of the laser beam from the laser chamber through the output coupling mirror; an angle sensor that detects a rotation angle of the prism; a first control unit that controls the actuator at a first operation frequency; and a second control unit that controls the actuator at a second operation frequency.

公开(公告)号：US20190181607A1

公开(公告)日：2019-06-13

申请号：US16266357

申请日：2019-02-04

Applicant: Gigaphoton Inc.

Inventor： Hirotaka MIYAMOTO ,  Osamu WAKABAYASHI

IPC: H01S3/137 ,  H01S3/225 ,  G01J3/02 ,  H01S3/08

CPC classification number: H01S3/137 ,  G01J3/0229 ,  H01S3/08009 ,  H01S3/0812 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

Abstract: A laser apparatus includes first and second wavelength dispersion elements, an optical element, first and second actuators, and a control unit. The first wavelength dispersion element generates wavelength dispersion in a direction orthogonal to an electric discharge direction between a pair of electric discharge electrodes. The second wavelength dispersion element generates wavelength dispersion in a direction parallel to the electric discharge direction. The optical element corrects wavelength dispersion generated by the second wavelength dispersion element. The first actuator drives the first wavelength dispersion element. The second actuator drives the optical element. The control unit controls the first actuator so that the center wavelength of the laser light approaches to a target wavelength and controls the second actuator so as to correct the wavelength dispersion generated by the second wavelength dispersion element.

公开(公告)号：US20180198253A1

公开(公告)日：2018-07-12

申请号：US15912633

申请日：2018-03-06

Applicant: Gigaphoton Inc.

Inventor： Hirotaka MIYAMOTO ,  Osamu WAKABAYASHI

IPC: H01S3/137 ,  H01S3/225 ,  H01S3/134 ,  H01S3/036

CPC classification number: H01S3/137 ,  H01S3/02 ,  H01S3/036 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/13 ,  H01S3/134 ,  H01S3/225

Abstract: A narrow band excimer laser apparatus includes a line narrowing module that narrows the spectral line width of laser light, a nitrogen gas introducing unit, a first valve that restricts the flow of nitrogen gas from the introducing unit into a casing of the module, an exhaust unit that causes gas to flow out from the casing, an exhaust pump for exhausting the gas from the casing, a second valve that restricts the exhausting of gas from the exhaust unit, an atmosphere discharge unit that discharges the gas within the casing into the atmosphere, a third valve that restricts the discharge of gas into the atmosphere, and a control unit that closes the second valve while opening the first and third valves, supplies nitrogen gas into the casing, then closes the third valve while opening the first and second valves, drives the exhaust pump, and causes laser oscillation thereafter.