Acoustic sensor
    13.
    发明授权
    Acoustic sensor 有权
    声传感器

    公开(公告)号:US09210515B2

    公开(公告)日:2015-12-08

    申请号:US14243755

    申请日:2014-04-02

    CPC classification number: H04R19/005 H04R2201/003

    Abstract: Provided are an acoustic sensor and a method of manufacturing the same. The acoustic sensor includes a substrate including an acoustic chamber, a first hole, and a second hole, penetrating the substrate, a lower electrode pad extended onto a top surface of the substrate while covering a sidewall of the first hole, a diaphragm pad extended onto the top surface of the substrate while covering a sidewall of the second hole, a lower electrode provided on the acoustic chamber and connected to the lower electrode pad, and a diaphragm above the lower electrode while being separated from the lower electrode and connected to the diaphragm pad.

    Abstract translation: 提供一种声传感器及其制造方法。 该声学传感器包括:衬底,包括穿透衬底的声学室,第一孔和第二孔;延伸到衬底顶表面上的下电极焊盘,同时覆盖第一孔的侧壁, 衬底的顶表面,同时覆盖第二孔的侧壁,设置在声学室上并连接到下电极焊盘的下电极,以及在与下电极分离并连接到隔膜的下电极之上的膜片 垫。

    Dual-side micro gas sensor and method of fabricating the same
    14.
    发明授权
    Dual-side micro gas sensor and method of fabricating the same 有权
    双面微气体传感器及其制造方法

    公开(公告)号:US08912613B2

    公开(公告)日:2014-12-16

    申请号:US13909477

    申请日:2013-06-04

    CPC classification number: G01N27/128 G01N27/123

    Abstract: Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.

    Abstract translation: 提供双面微气体传感器及其制造方法。 传感器可以包括弹性层,弹性层上的发热电阻层,发热电阻层上的层间绝缘层,层间绝缘层上的上感测层,以及设置在弹性层下方的下感测层 面对发热电阻层,从而减少发热电阻层的热损失。

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