公开(公告)号：US08912613B2

公开(公告)日：2014-12-16

申请号：US13909477

申请日：2013-06-04

Applicant: Electronics and Telecommunications Research Institute

Inventor： Hyung-Kun Lee ,  Seungeon Moon ,  Nak Jin Choi ,  Jaewoo Lee

IPC: H01L27/14 ,  G01N27/12

CPC classification number: G01N27/128 ,  G01N27/123

Abstract: Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.

Abstract translation: 提供双面微气体传感器及其制造方法。 传感器可以包括弹性层，弹性层上的发热电阻层，发热电阻层上的层间绝缘层，层间绝缘层上的上感测层，以及设置在弹性层下方的下感测层 面对发热电阻层，从而减少发热电阻层的热损失。