公开(公告)号：US10135217B2

公开(公告)日：2018-11-20

申请号：US15796514

申请日：2017-10-27

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Xiangjun Tian ,  Yan Chen ,  Xueyong Wang ,  Zhi Wang

IPC: H01S3/00 ,  H01S3/08 ,  H01L21/268 ,  H01L21/67 ,  H01S3/036 ,  H01L21/02 ,  H01L21/324 ,  H01S3/034 ,  H01S3/225 ,  H01S3/23

Abstract: The embodiments of the present disclosure provide an optical device and an excimer laser annealing equipment. The optical device includes: a light source; a transparent window spaced apart from the light source by a distance; and an optical system disposed between the light source and the transparent window. The transparent window is configured such that emergent light of the light source is vertically incident onto the transparent window after passing through the optical system.

公开(公告)号：US20180277374A1

公开(公告)日：2018-09-27

申请号：US15796514

申请日：2017-10-27

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Xiangjun Tian ,  Yan Chen ,  Xueyong Wang ,  Zhi Wang

IPC: H01L21/268 ,  H01L21/67 ,  H01L21/324 ,  H01L21/02 ,  H01S3/036

CPC classification number: H01S3/08059 ,  H01L21/02422 ,  H01L21/02595 ,  H01L21/2686 ,  H01L21/324 ,  H01L21/67098 ,  H01S3/034 ,  H01S3/036 ,  H01S3/225 ,  H01S3/23

Abstract: The embodiments of the present disclosure provide an optical device and an excimer laser annealing equipment. The optical device includes: a light source; a transparent window spaced apart from the light source by a distance; and an optical system disposed between the light source and the transparent window. The transparent window is configured such that emergent light of the light source is vertically incident onto the transparent window after passing through the optical system.

公开(公告)号：US09941147B2

公开(公告)日：2018-04-10

申请号：US15182953

申请日：2016-06-15

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Xueyong Wang ,  Qingrong Ren ,  Lu Wang ,  Yan Chen

IPC: H01L21/683 ,  H01L21/67

CPC classification number: H01L21/6838 ,  H01L21/67288

Abstract: A transfer apparatus includes a supporting member, a free electron excitation device and a detection device; the free electrons excitation device is configured to excite semiconductor material of an object to be transferred to generate free electrons, and the detection device is configured to detect whether material of a surface of the transferred object in contact with the support surface of the supporting member is conductive under excitation by the free electron excitation device. A laser annealing apparatus comprising the transfer apparatus is further provided.

公开(公告)号：US20170327358A1

公开(公告)日：2017-11-16

申请号：US15531798

申请日：2016-02-17

Applicant: BOE Technology Group Co., Ltd.

Inventor： Xueyong Wang ,  Yan Chen ,  Xiangjun Tian

IPC: B66F3/32 ,  F16K11/085

CPC classification number: B66F3/32 ,  B66F3/25 ,  B66F3/42 ,  F16K11/0856

Abstract: A hydraulic jack includes an oil cylinder, an oil tank, and an oil storage barrel. The oil storage barrel includes a front portion and a back portion which are opposite to each other; an oil outlet of the oil cylinder is connected with an oil inlet at the front portion of the oil storage barrel by means of an oil inlet pipe; and an oil inlet of the oil tank is connected with an oil outlet at the front portion of the oil storage barrel by means of an oil outlet pipe, the oil inlet pipe and the oil outlet pipe are provided with switching valves for alternatively turning on the oil inlet pipe and the oil outlet pipe. A partition plate that is capable of moving along a barrel wall and an elastic telescoping member are provided inside the oil storage barrel.