公开(公告)号：US20180065227A1

公开(公告)日：2018-03-08

申请号：US15676882

申请日：2017-08-14

Applicant: Applied Materials, Inc.

Inventor： Rajkumar Alagarsamy ,  Yongqi Hu ,  Simon Yavelberg ,  Periya Gopalan ,  Christopher R. Mahon

IPC: B24B37/20

Abstract: A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

公开(公告)号：US20160354901A1

公开(公告)日：2016-12-08

申请号：US15243571

申请日：2016-08-22

Applicant: Applied Materials, Inc.

Inventor： Kasiraman Krishnan ,  Nag B. Patibandla ,  Periya Gopalan

IPC: B24D18/00 ,  B33Y50/02 ,  B24B37/24 ,  B29C67/00 ,  B33Y80/00 ,  B33Y30/00

CPC classification number: B24D18/0054 ,  B24B37/245 ,  B24D3/28 ,  B29C64/112 ,  B29C64/165 ,  B29C64/386 ,  B29K2101/10 ,  B29K2101/12 ,  B29K2105/0067 ,  B29K2105/16 ,  B29L2031/736 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B33Y80/00

Abstract: A method of fabricating a polishing layer of a polishing pad includes determining a desired distribution of particles to be embedded within a polymer matrix of the polishing layer. A plurality of layers of the polymer matrix is successively deposited with a 3D printer, each layer of the plurality of layers of polymer matrix being deposited by ejecting a polymer matrix precursor from a nozzle. A plurality of layers of the particles is successively deposited according to the desired distribution with the 3D printer. The polymer matrix precursor is solidified into a polymer matrix having the particles embedded in the desired distribution.

Abstract translation: 制造抛光垫的抛光层的方法包括确定嵌入抛光层的聚合物基质内的颗粒的期望分布。 聚合物基体的多个层被连续地沉积有3D打印机，通过从喷嘴喷射聚合物基质前体而将多层聚合物基质的各层沉积。 根据3D打印机的期望分布，依次沉积多层颗粒。 将聚合物基质前体固化成具有嵌入所需分布的颗粒的聚合物基质。

公开(公告)号：US09421666B2

公开(公告)日：2016-08-23

申请号：US14511057

申请日：2014-10-09

Applicant: Applied Materials, Inc.

Inventor： Kasiraman Krishnan ,  Nag B. Patibandla ,  Periya Gopalan

IPC: B24B37/24 ,  B33Y10/00 ,  B33Y80/00 ,  B24D3/28 ,  B24D18/00 ,  B29C67/00 ,  B29K101/10 ,  B29K105/16

CPC classification number: B24D18/0054 ,  B24B37/245 ,  B24D3/28 ,  B29C64/112 ,  B29C64/165 ,  B29C64/386 ,  B29K2101/10 ,  B29K2101/12 ,  B29K2105/0067 ,  B29K2105/16 ,  B29L2031/736 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B33Y80/00

Abstract: A method of fabricating a polishing layer of a polishing pad includes determining a desired distribution of particles to be embedded within a polymer matrix of the polishing layer. A plurality of layers of the polymer matrix is successively deposited with a 3D printer, each layer of the plurality of layers of polymer matrix being deposited by ejecting a polymer matrix precursor from a nozzle. A plurality of layers of the particles is successively deposited according to the desired distribution with the 3D printer. The polymer matrix precursor is solidified into a polymer matrix having the particles embedded in the desired distribution.

Abstract translation: 制造抛光垫的抛光层的方法包括确定嵌入抛光层的聚合物基质内的颗粒的期望分布。 聚合物基体的多个层被连续地沉积有3D打印机，通过从喷嘴喷射聚合物基质前体而将多层聚合物基质的各层沉积。 根据3D打印机的期望分布，依次沉积多层颗粒。 将聚合物基质前体固化成具有嵌入所需分布的颗粒的聚合物基质。

公开(公告)号：US20150126099A1

公开(公告)日：2015-05-07

申请号：US14511057

申请日：2014-10-09

Applicant: Applied Materials, Inc.

Inventor： Kasiraman Krishnan ,  Nag B. Patibandla ,  Periya Gopalan

IPC: B24B37/24 ,  B24D3/28 ,  B29C67/00 ,  B24D18/00

CPC classification number: B24D18/0054 ,  B24B37/245 ,  B24D3/28 ,  B29C64/112 ,  B29C64/165 ,  B29C64/386 ,  B29K2101/10 ,  B29K2101/12 ,  B29K2105/0067 ,  B29K2105/16 ,  B29L2031/736 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B33Y80/00

Abstract: A method of fabricating a polishing layer of a polishing pad includes determining a desired distribution of particles to be embedded within a polymer matrix of the polishing layer. A plurality of layers of the polymer matrix is successively deposited with a 3D printer, each layer of the plurality of layers of polymer matrix being deposited by ejecting a polymer matrix precursor from a nozzle. A plurality of layers of the particles is successively deposited according to the desired distribution with the 3D printer. The polymer matrix precursor is solidified into a polymer matrix having the particles embedded in the desired distribution.

Abstract translation: 制造抛光垫的抛光层的方法包括确定嵌入抛光层的聚合物基质内的颗粒的期望分布。 聚合物基体的多个层被连续地沉积有3D打印机，通过从喷嘴喷射聚合物基质前体而将多层聚合物基质的各层沉积。 根据3D打印机的期望分布，依次沉积多层颗粒。 将聚合物基质前体固化成具有嵌入所需分布的颗粒的聚合物基质。

公开(公告)号：US08961266B2

公开(公告)日：2015-02-24

申请号：US13839899

申请日：2013-03-15

Applicant: Applied Materials, Inc.

Inventor： Rajkumar Alagarsamy ,  Yongqi Hu ,  Simon Yavelberg ,  Periya Gopalan ,  Christopher R. Mahon

IPC: B24B49/12 ,  B24B37/20

CPC classification number: B24B37/205 ,  B24B37/22

Abstract: A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

Abstract translation: 抛光制品具有抛光表面和孔，该孔包括第一部分和第二部分。 抛光制品包括向内延伸到孔中的突起。 抛光制品包括在离研磨表面更远的第一表面的一侧的下部。 窗口具有位于孔的第一部分中的第一部分和延伸到孔的第二部分中的第二部分。 窗口具有基本上平行于抛光表面的第二表面。 第一粘合剂将突起的第一表面粘附到窗口的第二表面以将窗口固定到突起，并且将第二粘合剂与不同于第一粘合剂的材料组合物粘合。 第二粘合剂横向定位在窗的第二部分和抛光制品的下部之间。