Diffuse reflectance readhead
    111.
    发明申请
    Diffuse reflectance readhead 有权
    漫反射读数头

    公开(公告)号:US20080062425A1

    公开(公告)日:2008-03-13

    申请号:US11981941

    申请日:2007-11-01

    CPC classification number: G01N21/474 G01N21/3151 G01N2021/478 G01N2201/0642

    Abstract: A glucose monitoring system comprising a readhead positioned a predetermined distance from a sample aperture. The readhead comprises first and second LEDs adapted to emit intersecting paths of light. A beam splitter is positioned at the intersection of the light paths. The beam splitter comprises a band pass filter for controlling the center wavelength of a resulting coaxial emitted light for illuminating a sample on the sample aperture. The readhead further comprises a detector which comprises a detector aperture and a molded lens over the detector aperture. A light-scattering section upstream of the lens comprises a plurality of steps having angles greater than 90 degrees to reduce internal stray light.

    Abstract translation: 一种葡萄糖监测系统,包括位于距样本孔预定距离的读取头。 读取头包括适于发射相交光线的第一和第二LED。 分束器位于光路的交叉处。 分束器包括带通滤波器,用于控制所产生的同轴发射光的中心波长,用于照射样品孔上的样品。 读取头还包括检测器,其包括检测器孔和在检测器孔上的模制透镜。 透镜上游的光散射部分包括具有大于90度的角度的多个台阶以减少内部杂散光。

    Laser projection with object feature detection
    112.
    发明授权
    Laser projection with object feature detection 有权
    激光投射与物体特征检测

    公开(公告)号:US07306339B2

    公开(公告)日:2007-12-11

    申请号:US11345784

    申请日:2006-02-01

    Abstract: A laser projection system scans an output laser light beam onto an object to detect features. A high-sensitivity optical feedback system receives and detects a feedback beam of the output beam light diffusely reflected from the object. The feedback light and projected output beam share the same beam path between beam-steering mirrors of the projector and the object. The laser projection system has light suppression components to control stray scattered light, including ambient light, from being detected. A computer of the laser projection system calculates fiducial points on the object from detected features to align the projection system with the object without using targets. This feature detection is used in a process to guide assembly and fabrication on or to the object, and to verify the accurate placement of parts and fabrication steps in place after they are assembled or processed. In one form, the detected feature is a light spot on the object produced by a second light source.

    Abstract translation: 激光投影系统将输出激光束扫描到物体上以检测特征。 高灵敏度的光学反馈系统接收并检测从物体漫反射的输出光束的反射光束。 反射光和投影输出光束在投影仪的光束 - 转向镜与物体之间共享相同的光束路径。 激光投影系统具有抑制被检测的散射光(包括环境光)的光抑制元件。 激光投影系统的计算机根据检测到的特征来计算物体上的基准点,使投影系统与物体对准,而不使用目标。 该特征检测用于在物体上引导组装和制造的过程,并且在组装或处理之后验证零件和制造步骤的准确位置。 在一种形式中,检测到的特征是由第二光源产生的物体上的光点。

    Optical sensor and method for optically inspecting surfaces
    113.
    发明申请
    Optical sensor and method for optically inspecting surfaces 失效
    用于光学检测表面的光学传感器和方法

    公开(公告)号:US20070252976A1

    公开(公告)日:2007-11-01

    申请号:US11789228

    申请日:2007-04-24

    Abstract: In one aspect, an optical sensor is used to detect defects, which can appear on smooth surfaces, is provided. The sensor includes a telecentric laser scanner and a detection unit. The scanner includes a laser for the approximately perpendicular illumination of a smooth surface, a scanning mirror, and a telecentric optical system for guiding illumination and detection beams the detection unit includes an optical detector system, a central diaphragm, which is concentrically positioned in the vicinity of the optical detector system in the direction toward the telecentric laser scanner, a highly sensitive photomultiplier for detecting scattered light, which emanates from defects on smooth surfaces, and a slit diaphragm arranged upstream of the photomultiplier.

    Abstract translation: 在一个方面,提供光学传感器来检测出现在光滑表面上的缺陷。 传感器包括远心激光扫描仪和检测单元。 扫描器包括用于光滑表面的大致垂直照明的激光器,扫描镜和用于引导照射和检测光束的远心光学系统,该检测单元包括光学检测器系统,中心光阑,其同心地位于附近 的光检测器系统朝向远心激光扫描器的方向,用于检测由平滑表面上的缺陷产生的散射光的高灵敏度光电倍增器和布置在光电倍增管上游的狭缝光阑。

    Particle inspection apparatus and method, exposure apparatus, and device manufacturing method
    114.
    发明申请
    Particle inspection apparatus and method, exposure apparatus, and device manufacturing method 有权
    颗粒检查装置和方法,曝光装置和装置制造方法

    公开(公告)号:US20060238752A1

    公开(公告)日:2006-10-26

    申请号:US11359431

    申请日:2006-02-23

    Abstract: An inspection apparatus for inspecting a surface of an object for a particle includes an irradiator configured to irradiate the surface with inspection light, a first detector configured to detect light scattered at the surface, and a shield configured to limit an irradiation region of the inspection light emitted by the irradiator within a limited region of the surface.

    Abstract translation: 用于检查颗粒物体的表面的检查装置包括:被配置为用表面照射检查光的照射器,被配置为检测在表面散射的光的第一检测器和被配置为限制检查光的照射区域的屏蔽 由辐射器在表面的有限区域内发射。

    Laser projection with object feature detection
    115.
    发明申请
    Laser projection with object feature detection 有权
    激光投射与物体特征检测

    公开(公告)号:US20060170870A1

    公开(公告)日:2006-08-03

    申请号:US11345784

    申请日:2006-02-01

    Abstract: A laser projection system scans an output laser light beam onto an object to detect features. A high-sensitivity optical feedback system receives and detects a feedback beam of the output beam light diffusely reflected from the object. The feedback light and projected output beam share the same beam path between beam-steering mirrors of the projector and the object. The laser projection system has light suppression components to control stray scattered light, including ambient light, from being detected. A computer of the laser projection system calculates fiducial points on the object from detected features to align the projection system with the object without using targets. This feature detection is used in a process to guide assembly and fabrication on or to the object, and to verify the accurate placement of parts and fabrication steps in place after they are assembled or processed. In one form, the detected feature is a light spot on the object produced by a second light source.

    Abstract translation: 激光投影系统将输出激光束扫描到物体上以检测特征。 高灵敏度的光学反馈系统接收并检测从物体漫反射的输出光束的反射光束。 反射光和投影输出光束在投影仪的光束 - 转向镜与物体之间共享相同的光束路径。 激光投影系统具有抑制被检测的散射光(包括环境光)的光抑制元件。 激光投影系统的计算机根据检测到的特征来计算物体上的基准点,以将投影系统与物体对准,而不使用目标。 该特征检测用于在物体上引导组装和制造的过程,并且在组装或处理之后验证零件和制造步骤的准确位置。 在一种形式中,检测到的特征是由第二光源产生的物体上的光点。

    Aperture to reduce sensitivity to sample tilt in small spotsize reflectometers
    116.
    发明申请
    Aperture to reduce sensitivity to sample tilt in small spotsize reflectometers 失效
    光圈以减小小点状反射计中样品倾斜的灵敏度

    公开(公告)号:US20050225767A1

    公开(公告)日:2005-10-13

    申请号:US10820903

    申请日:2004-04-08

    Applicant: Adam Norton

    Inventor: Adam Norton

    CPC classification number: G01N21/8806 G01N21/55 G01N21/9501 G01N2201/0642

    Abstract: An aperture for reducing tilt sensitivity in normal incidence optical metrology is formed to include one or more holes. The aperture is positioned to partially occlude one-half of the pupil of a normal incidence objective. A probe beam is projected to fill the pupil of the objective. The portion of the incident probe beam that passes through the aperture is reduced in cross-sectional profile. As a result, after reflection by the sample, that portion of the probe beam underfills the non-occluded portion of the pupil. The portion of the incident probe beam that passes through the non-occluded portion of the pupil overfills the occluded pupil upon reflect by the sample. The combination of underfilling and overfilling reduces the sensitivity of the objective to tilting of the sample.

    Abstract translation: 形成用于降低正常入射光学测量中的倾斜灵敏度的孔,以包括一个或多个孔。 孔径定位成部分地遮挡法向入射物镜的瞳孔的一半。 投影探测光束以填充物镜的光瞳。 穿过孔的入射探针光束的部分在横截面轮廓上减小。 结果,在样品反射之后,探测光束的该部分底部填充瞳孔的未遮挡部分。 入射探测光束穿过瞳孔的未遮挡部分的部分,在被样品反射时,超过填充的瞳孔。 填充和过度填充的组合降低了物镜倾斜样品的灵敏度。

    High performance fluorescent optical sensor
    117.
    发明申请
    High performance fluorescent optical sensor 有权
    高性能荧光光学传感器

    公开(公告)号:US20030156290A1

    公开(公告)日:2003-08-21

    申请号:US10316188

    申请日:2002-12-11

    CPC classification number: G01N21/645 G01N21/6428 G01N21/7703 G01N2201/0642

    Abstract: An optical sensor device for determining the presence or concentration of an analyte, contains a waveguide disposed over a light source and a light detector mounted on a surface of a substrate and separated by an internal baffle, wherein the waveguide has a thickness corresponding to a far field emission point of the light source as determined by a light shielding baffle between the light source and light detector. An analyte indicator matrix is disposed on the outer surface of the waveguide. The sensor device geometry takes advantage of only direct illumination of the indicator matrix, and direct collection of indicator matrix illumination, without any significant reflection by said waveguide. Undesirable light noise generated by the light source passes directly out of the device through the waveguide.

    Abstract translation: 用于确定分析物的存在或浓度的光学传感器装置包含设置在光源上的波导和安装在基板的表面上并由内部挡板隔开的光检测器,其中波导具有对应于远的 由光源和光检测器之间的遮光挡板确定的光源的场发射点。 分析物指示矩阵设置在波导的外表面上。 传感器装置的几何形状仅利用指示矩阵的直接照明,并且直接收集指示矩阵照明,而不会被所述波导的任何明显的反射。 由光源产生的不良光线噪声通过波导直接从器件中流出。

    Photometric readhead with light-shaping plate
    118.
    发明授权
    Photometric readhead with light-shaping plate 失效
    光度读数头与光成型板

    公开(公告)号:US06181417B2

    公开(公告)日:2001-01-30

    申请号:US09062987

    申请日:1998-04-20

    Abstract: A readhead for a spectrometer for illuminating a target area and receiving light from said target area is provided with a housing adapted to be incorporated in a spectrometer, a light source mounted in a fixed position relative to the housing, a support mechanism adapted to support a biological sample to be illuminated by the light source, a light-shaping mechanism disposed between the light source and the support for increasing the diameter, intensity, and uniformity of the light beam, and a photodetector mounted in fixed position relative to the housing, the photodetector being adapted to detect light from a biological sample disposed in the target area illuminated light sources. The light sources may be in the form of a light-emitting diode that emits substantially monochromatic light having a first wavelength, and the readhead may also include a second light-emitting diode that is adapted to emit substantially monochromatic light of a second wavelength towards the target area.

    Abstract translation: 用于照射目标区域并接收来自所述目标区域的光的光谱仪的读取头设置有适于结合在光谱仪中的壳体,安装在相对于壳体的固定位置的光源,适于支撑 由光源照射的生物样品,设置在光源和支撑体之间的光成形机构,用于增加光束的直径,强度和均匀性;以及光电检测器,其安装在相对于壳体的固定位置, 光电检测器适于检测设置在目标区域照明光源中的生物样品的光。 光源可以是发射基本上具有第一波长的单色光的发光二极管的形式,并且读取头还可以包括第二发光二极管,其适于将基本上第二波长的单色光朝向 目标区域。

    Optical probe for fluid light transmission properties
    119.
    发明授权
    Optical probe for fluid light transmission properties 失效
    光学探头用于流体透光性能

    公开(公告)号:US5402241A

    公开(公告)日:1995-03-28

    申请号:US775872

    申请日:1991-10-15

    Abstract: Radiant energy is transmitted to a probe element including an interior conical reflecting surface and a fluid sample chamber. Portions of the light which have been transmitted, partially attenuated, or scattered by a fluid sample in the sample chamber are directed by at least a portion of the interior conical reflecting surface to means for collecting the transmitted, partially attenuated, or scattered light. A stilling valve incorporated into the probe element enables elimination of entrained gas bubbles from the chamber.

    Abstract translation: 辐射能量传递到包括内部锥形反射表面和流体样品室的探针元件。 通过样品室中的流体样品透射,部分衰减或散射的光的部分由内部锥形反射表面的至少一部分引导到用于收集透射的,部分衰减的或散射的光的装置。 结合到探针元件中的静止阀能够消除来自腔室的夹带的气泡。

    Fluid pollution monitor
    120.
    发明授权
    Fluid pollution monitor 失效
    流体污染监测

    公开(公告)号:US5392114A

    公开(公告)日:1995-02-21

    申请号:US884398

    申请日:1992-05-18

    Applicant: Martin T. Cole

    Inventor: Martin T. Cole

    Abstract: A pollution monitoring device including a fluid sampling chamber (21), a collimated light source (14, 15) directing a light beam (10, 11) into the chamber, a port (23) for introducing sample fluid into the chamber exposed to the light beam, a light detector cell (16) separated or shaded from the light beam and focussing apparatus (17) for directing scattered light produced by the presence of suspended particles and molecules in the chamber towards the detector. The source may be two lasers with co-linear beams or an LED. There is also disclosed a sample area of small diameter in which a light beam traverses the area across the flow path of a sample fluid and a projector projecting scattered light from particles into a light receiving zone of notional triangular shape having an included angle of less than 60.degree., to enable discrimination of particle size discrimination.

    Abstract translation: 一种污染监测装置,包括流体采样室(21),将光束(10,11)引导到室中的准直光源(14,15),用于将样品流体引入暴露于 光束,与光束分离或阴影的光检测器单元(16)和聚焦装置(17),用于将由室中的悬浮颗粒和分子的存在产生的散射光引向检测器。 源可以是具有共线性光束或LED的两个激光器。 还公开了一种小直径的样品区域,其中光束穿过样品流体的流动路径的区域和投影仪将投射散射的光从颗粒投射到具有小于等于或等于的夹角的三角形形状的光接收区域中 60°,以便区分粒度鉴别。

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