Parallel kinematic micromanipulator

    公开(公告)号:US06671975B2

    公开(公告)日:2004-01-06

    申请号:US10014956

    申请日:2001-12-10

    IPC分类号: G01D2100

    摘要: A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.

    Parallel kinematic micromanipulator
    92.
    发明申请
    Parallel kinematic micromanipulator 失效
    平行运动显微操纵器

    公开(公告)号:US20030204965A1

    公开(公告)日:2003-11-06

    申请号:US10413260

    申请日:2003-04-14

    IPC分类号: G01D021/00

    摘要: A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.

    摘要翻译: 提供了一种提供纳米精度运动的方法和装置。 根据本发明,使用至少三个运动链路形成平行运动学显微操纵器。 运动链路可以包括提供位置信息的高分辨率非接触式编码器。 显微操纵器的移动通过与每个运动连杆相关联地设置的压电线性致动器进行。 平行运动学结构和压电线性致动器的组合提供了能够以高精度或重复性定位组件或仪器的显微操纵器。 根据本发明,可以提供三个和六个自由度的运动学。

    PARALLEL KINEMATIC MICROMANIPULATOR
    93.
    发明申请
    PARALLEL KINEMATIC MICROMANIPULATOR 失效
    并行动力微机

    公开(公告)号:US20030106230A1

    公开(公告)日:2003-06-12

    申请号:US10014956

    申请日:2001-12-10

    IPC分类号: G01D021/00

    摘要: A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.

    摘要翻译: 提供了一种提供纳米精度运动的方法和装置。 根据本发明,使用至少三个运动链路形成平行运动学显微操纵器。 运动链路可以包括提供位置信息的高分辨率非接触式编码器。 显微操纵器的移动通过与每个运动连杆相关联地设置的压电线性致动器进行。 平行运动学结构和压电线性致动器的组合提供了能够以高精度或重复性定位组件或仪器的显微操纵器。 根据本发明,可以提供三个和六个自由度的运动学。

    Compensating system for a hexapod
    94.
    发明授权
    Compensating system for a hexapod 有权
    六足补偿系统

    公开(公告)号:US06474915B1

    公开(公告)日:2002-11-05

    申请号:US09674060

    申请日:2000-10-25

    IPC分类号: B23C900

    摘要: A hexapod, for example, a hexapod used to position a tool with respect to a part to be machined, includes two spaced plates interconnected by six articulated and extensible legs. The two plates, including a base plate and a mobile plate, and the six legs are joined for varying, at will, the relative position of the mobile plate with respect to that of the base plate. The hexapod further includes a device for reducing and/or compensating for stresses on the elements of the hexapod, which can be a mechanical device, such as a jack, coupling a fixed surface with the periphery of the mobile plate and/or logic (in software) for defining at least one force-limiting criterion.

    摘要翻译: 例如,用于将工具相对于待加工部件定位的六足杆包括两个由六个铰接和可伸展的腿相互连接的间隔板。 包括底板和移动板的两个板和六个腿被连接以随意地改变移动板相对于基板的相对位置。 六足还包括用于减小和/或补偿六足动物元件上的应力的装置,其可以是诸如千斤顶的机械装置,将固定表面与移动板和/或逻辑的周边(在 软件),用于定义至少一个限制力的标准。

    Assembly robot for wing
    95.
    发明授权
    Assembly robot for wing 失效
    机翼装配机器人

    公开(公告)号:US06428452B1

    公开(公告)日:2002-08-06

    申请号:US09646525

    申请日:2000-11-20

    IPC分类号: B23Q3157

    摘要: A method and a device for assembling an air-craft wing incorporating at least two of the operations drilling, riveting and fitting of anchor nuts (20), where a robot (7) is mobile relative to the wing in a plane parallel to the wing and where the robot (7) is equipped with an arm (9) designed to accommodate a tool holder (15), where the tool holder (15) is primarily equipped with tools for performing a single work operation, whereby the robot is moved so that the robot arm (9) is positioned at the first work position on the aircraft wing unit, where the robot (7) carries out the first work operation at the said first work position, where the robot arm (9) is manoeuvred in the correct order to new work positions on the wing unit within a work area (10) reachable by the robot arm (9), and carries out the first work operation at these new work positions.

    摘要翻译: 一种用于组装包括至少两个锚定螺母(20)的钻孔,铆接和装配的飞行器机翼的方法和装置,其中机器人(7)能够在平行于翼的平面中相对于机翼移动 并且其中所述机器人(7)配备有设计成容纳工具架(15)的臂(9),其中所述工具保持器(15)主要配备有用于执行单个作业操作的工具,由此所述机器人被移动 机器人臂(9)位于飞行器机翼单元上的第一工作位置,其中机器人(7)在所述第一工作位置执行机器人手臂(9)在其中操纵的第一工作操作 在机器人臂(9)可到达的工作区域(10)内的机翼单元上的新的工作位置的正确顺序,并且在这些新的工作位置执行第一次工作操作。

    Six-degrees-of-freedom parallel mechanism for micro-positioning work
    97.
    发明申请
    Six-degrees-of-freedom parallel mechanism for micro-positioning work 失效
    用于微定位工作的六自由度并联机构

    公开(公告)号:US20020007690A1

    公开(公告)日:2002-01-24

    申请号:US09726305

    申请日:2000-12-01

    IPC分类号: A47G029/00 B25J018/00

    摘要: A six-degrees-of-freedom parallel mechanism for micro-positioning work is disclosed. This mechanism freely performs a desired motion of translation and rotation of a moving platform using internal and external links actuated by linear actuators capable of precisely controlling the link positions, thus being effectively used as a 6d of parallel mechanism required to carry out a variety of micro-positioning works within a limited workspace. In the mechanism of this invention, a moving platform 10 is placed at an upper position, with a multiaxial spherical joint 40 mounted to the central portion of the moving platform 10. A base platform 20 is placed at a lower position of the mechanism. Three external links 30 couple the moving platform 10 to the base platform 20, while three internal links 50 couple the multiaxial spherical joint 40 to the base platform 20. In this mechanism, the internal links 50 are commonly coupled to the multiaxial spherical joint 40 so as to form a tetrahedral structure. In addition, each of the internal and external links 50 and 30 is a linear actuator designed to be precisely controllable in its position.

    摘要翻译: 公开了一种用于微定位工作的六自由度并联机构。 该机构使用由能够精确控制连杆位置的线性致动器致动的内部和外部链节自由地执行移动平台的平移和旋转的所需运动,因此有效地用作执行各种微型装置所需的并行机构的6d 定位工作在有限的工作区内。 在本发明的机构中,移动平台10放置在上部位置,多轴球面接头40安装在移动平台10的中心部分。底座平台20放置在机构的下部位置。 三个外部连杆30将移动平台10连接到基座平台20,而三个内部连杆50将多轴球面接头40连接到基座平台20.在该机构中,内部连杆50通常联接到多轴球面接头40 以形成四面体结构。 此外,内部和外部连杆50和30中的每一个是设计成在其位置上可精确控制的线性致动器。

    Integrated prober, handler and tester for semiconductor components
    98.
    发明授权
    Integrated prober, handler and tester for semiconductor components 失效
    用于半导体元件的集成探测器,处理器和测试仪

    公开(公告)号:US6024526A

    公开(公告)日:2000-02-15

    申请号:US546236

    申请日:1995-10-20

    摘要: An integral unit for use in testing semiconductor components. The unit is designed to manipulate either packaged semiconductor components or semiconductor wafers and present them to a test head. It provides significant space savings because it replaces the need for separate prober, handler and tester units. The integrated unit includes a positioning mechanism with a tool plate that can be changed to grasp either a semiconductor wafer or a tray of semiconductor components. The tool plate uses a vacuum plate. To hold a tray of semiconductor parts, the vacuum plate has numerous independently operable holes. Each hole is positioned behind one semiconductor component and can be engaged or released separately so that the components can be sorted into separate output bins. To hold a wafer, the tool plate has an extendible tongue member that can be inserted into a stack of semiconductor wafers to pick up one wafer in the stack. One disclosed positioning mechanism is a hexapod unit, which, due to its light weight, allows fast and accurate positioning of the semiconductor devices. Multiple positioning mechanisms are used in some instances to increase throughput.

    摘要翻译: 用于测试半导体元件的整体单元。 该单元被设计为操纵封装的半导体元件或半导体晶片并将其呈现给测试头。 它提供了显着的空间节省,因为它代替了单独的探测器,处理器和测试仪单元的需要。 集成单元包括具有工具板的定位机构,其可以改变以掌握半导体晶片或半导体部件的托盘。 工具板使用真空板。 为了保持半导体部件的托盘,真空板具有许多可独立操作的孔。 每个孔定位在一个半导体部件的后面,并且可以单独地接合或释放,使得部件可以被分类到单独的输出箱中。 为了保持晶片,工具板具有可延伸的舌构件,其可以插入到堆叠的半导体晶片中以拾取堆叠中的一个晶片。 一种公开的定位机构是六足单元,其由于其重量轻,允许半导体器件的快速和精确的定位。 在一些情况下使用多个定位机制来增加吞吐量。

    Mechanical manipulator
    99.
    发明授权
    Mechanical manipulator 失效
    机械机械手

    公开(公告)号:US5575597A

    公开(公告)日:1996-11-19

    申请号:US119189

    申请日:1993-10-05

    摘要: The present invention relates to a computer aided design and manufacturing system. The system comprises a platform suspended by means of three pairs of supportive legs which are coupled at triangularly spaced-apart locations by means of three universal joints, each of which couples to one end of each of the two legs of a respective pair. The two legs of each pair extend from their respective universal joint in divergent directions to spaced-apart locations in an overhead mounting where each leg is drivingly engaged by a respective gimbal-mounted electric motor arranged to move the leg in its own longitudinal direction. The platform position and orientation can be controlled by appropriate operation of the six leg drive motors. A rotary indexing stage is mounted on the platform for rotation in the plane of the platform under control of a further electric motor and serves as a mounting for a stage providing for pivotal movement in a plane perpendicular to the plane of rotation of the indexing stage, such pivotal movement being effected under the control of yet a further electric motor. Mounted on the pivotal stage is a rotary tool holder arranged to be driven by yet another electric motor. The various electric motors are precisely positionable under computer control for effecting automatic manufacture of an object by cutting the object out of a block of material by means of a tool held in the tool holder.

    摘要翻译: PCT No.PCT / GB92 / 00613 Sec。 371日期:1993年10月5日 102(e)日期1993年10月5日PCT提交1992年4月6日PCT公布。 出版物WO92 / 17313 日期:1992年10月15日本发明涉及计算机辅助设计和制造系统。 该系统包括通过三对支撑腿悬挂的平台,三对支撑腿通过三个万向接头联接在三角形间隔开的位置,每个通用接头联接到相应对的两个腿中的每一个的一端。 每对的两个腿从发散方向的各自的万向节延伸到顶部安装中的间隔开的位置,其中每个腿通过布置成在其自身的纵向方向上移动腿部的相应的万向节安装的电动机驱动地接合。 平台位置和方向可以通过六脚驱动马达的适当操作来控制。 旋转分度台安装在平台上,用于在另外的电动机的控制下在平台的平面中旋转,并且用作用于在垂直于分度台的旋转平面的平面中枢转运动的台架的安装件, 这样的枢转运动在另外的电动马达的控制下进行。 安装在枢转台上的是旋转工具架,其设置成由另一个电动机驱动。 各种电动机在计算机控制下精确定位,以通过借助于保持在工具架中的工具将物体从材料块切割出来来实现物体的自动制造。

    Process for hybrid position/force control for a robot manipulator
    100.
    发明授权
    Process for hybrid position/force control for a robot manipulator 失效
    用于机器人操纵器的混合位置/力控制的过程

    公开(公告)号:US5469531A

    公开(公告)日:1995-11-21

    申请号:US183230

    申请日:1994-01-19

    摘要: The invention relates to the control of robot manipulators comprised of a macro-manipulator combined with a micro-manipulator with a load grasping device. The control is accomplished from set-point values of force (F.sup.d) and set-point values of position (.chi..sup.d), which are compared to real values (F.sup.m, .chi..sup.m) in order to produce increments of displacement (.DELTA.x, .DELTA.y, .DELTA.z, .DELTA..theta.x, .DELTA..theta.y, .DELTA..theta.z) intended for the load grasping device. Added to values (.chi..sup.m) representing the actual position, these increments yield new set-point values of position (.chi.'.sup.d) of the load grasping device. These set-point values are distributed (at 29) between the macro-manipulator and the micro-manipulator, taking into account the deformation (.DELTA.X ) and the mobility that are acceptable for the macro-manipulator. Specific application: robot manipulator of large size and high capacity for outdoor use, especially on construction sites.

    摘要翻译: 本发明涉及一种机器人操纵器的控制,该机器人操纵器包括与具有加载抓握装置的微操纵器结合的宏观操纵器。 控制是从力(Fd)的设定值和位置(chi d)的设定点值来实现的,它们与实际值(Fm,chi m)进行比较,以产生位移增量(DELTA x,DELTA y,DELTA z,DELTAθx,DELTAθy,DELTAθz)。 加上表示实际位置的值(chi m),这些增量产生负载抓取装置的位置(chi')的新的设定值。 考虑到宏观操纵器可接受的变形(DELTA X)和移动性,这些设定值在宏观操纵器和微机械手之间分布(在29处)。 具体应用:大型,高容量户外用途的机器人操纵器,特别是施工现场。