公开(公告)号：US06671975B2

公开(公告)日：2004-01-06

申请号：US10014956

申请日：2001-12-10

申请人： C. William Hennessey

发明人： C. William Hennessey

IPC分类号： G01D2100

CPC分类号： H02N2/0095 ,  B25J7/00 ,  B25J17/0216 ,  H02N2/026

摘要： A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.

公开(公告)号：US06769194B2

公开(公告)日：2004-08-03

申请号：US10413260

申请日：2003-04-14

申请人： C. William Hennessey

发明人： C. William Hennessey

IPC分类号： G01D2100

CPC分类号： H02N2/0095 ,  B25J7/00 ,  B25J17/0216 ,  H02N2/026

摘要： A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.

摘要翻译： 提供了一种提供纳米精度运动的方法和装置。 根据本发明，使用至少三个运动链路形成平行运动学显微操纵器。 运动链路可以包括提供位置信息的高分辨率非接触式编码器。 显微操纵器的移动通过与每个运动连杆相关联地设置的压电线性致动器进行。 平行运动学结构和压电线性致动器的组合提供了能够以高精度或重复性定位组件或仪器的显微操纵器。 根据本发明，可以提供三个和六个自由度的运动学。