公开(公告)号：US20240404857A1

公开(公告)日：2024-12-05

申请号：US18412310

申请日：2024-01-12

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chen-Hao LIAO ,  Pei-Yu LEE ,  Chih-Tsung LEE ,  Cheng-Lung WU ,  Jiun-Rong PAI

IPC: H01L21/677 ,  H01L21/324 ,  H01L21/673

Abstract: Base plates of a substrate retainer transportation mechanism are provided with damping members to assist elastic members in damping and limiting movement of the substrate retainer transportation mechanism when the substrate transportation mechanism is subjected to unwanted external forces, e.g., seismic forces. By damping and limiting movement of the substrate retainer transportation mechanism, undesirable damage to substrates contained in a substrate retainer being carried by the substrate retainer transport mechanism can be minimized.