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    PLASMA GENERATION CIRCUIT AND SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME
    1.
    发明申请
    PLASMA GENERATION CIRCUIT AND SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME 有权

    公开(公告)号：US20250149293A1

    公开(公告)日：2025-05-08

    申请号：US18747933

    申请日：2024-06-19

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Jaewon Jeong ,  Dongchan Jeon ,  Kyungsun Kim ,  Sungyeol Kim ,  Yongwon Cho

    IPC: H01J37/32

    Abstract: A plasma generation circuit includes a high frequency power source configured to generate a first high frequency current; a current divider comprising a first capacitor and a variable capacitor and configured to divide the first high frequency current into a second high frequency current and a third high frequency current; an antenna assembly comprising a center antenna connected to the current divider and through which the second high frequency current is configured to flow, and an edge antenna connected in to the current divider and through which the third high frequency current is configured to flow, the antenna assembly being configured to induce generation of an inductively coupled plasma; a first coil coupled inductor configured to allow the second high frequency current to flow therethrough; and a second coil coupled inductor configured to allow the third high frequency current to flow therethrough and adjacent to the first coil coupled inductor.

    Display apparatus and light source device thereof
    3.
    发明授权
    Display apparatus and light source device thereof 有权

    公开(公告)号：US12181745B2

    公开(公告)日：2024-12-31

    申请号：US18474565

    申请日：2023-09-26

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Chunsoon Park ,  Sungyeol Kim ,  Kyehoon Lee

    IPC: G02F1/1335 ,  G02F1/13357

    Abstract: A light source device comprises a diffuser plate and a light source module disposed behind the diffuser plate. The light source module includes a substrate, a plurality of light emitting diodes mounted on the substrate, and a plurality of reflective layers each provided on a front surface of the plurality of light emitting diodes. When a distance between the centers of each of the plurality of light emitting diodes is referred to as a pitch, and a distance between the diffuser plate and the substrate is referred to as an optical distance, a ratio of the pitch to the optical distance satisfies the following expression: 2.5≤pitch/optical distance≤4.5.

    Plasma processing apparatus and plasma processing method
    9.
    发明授权
    Plasma processing apparatus and plasma processing method 有权

    公开(公告)号：US11646179B2

    公开(公告)日：2023-05-09

    申请号：US17335659

    申请日：2021-06-01

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Jang-Yeob Lee ,  Sungyeol Kim ,  Jinyeong Yun ,  Minsung Kim ,  HoSun Yoo

    IPC: H01J37/32

    CPC classification number: H01J37/32642 ,  H01J37/32541 ,  H01J37/32568 ,  H01J37/32715

    Abstract: A plasma processing apparatus includes a chamber providing a space for processing a substrate, a substrate stage configured to support the substrate within the chamber and including a lower electrode, an upper electrode facing the lower electrode, a focus ring in or on an upper peripheral region of the substrate stage to surround the substrate, and a plasma adjustment assembly in at least one of a first position between the upper electrode and the lower electrode and a second position between the focus ring and the lower electrode, the plasma adjustment assembly including a photoreactive material layer and a plurality of light sources configured to irradiate light onto a local region of the photoreactive material layer. A capacitance of the local region is changed as the light is irradiated to the local region.

    DISPLAY APPARATUS AND LIGHT APPARATUS THEREOF
    10.
    发明申请
    DISPLAY APPARATUS AND LIGHT APPARATUS THEREOF 有权

    公开(公告)号：US20220351694A1

    公开(公告)日：2022-11-03

    申请号：US17863918

    申请日：2022-07-13

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Sungyeol Kim ,  Sungbok Yang ,  Seokwoo Yong ,  Kyehoon Lee ,  Junsung Choi

    IPC: G09G3/34 ,  G02F1/13357 ,  G09G3/36

    Abstract: A display apparatus includes: a liquid crystal panel; and a light apparatus on which the liquid crystal panel is disposed, the light apparatus including: a substrate; a plurality of dimming blocks including a first dimming block and a second dimming block disposed immediately next to the first dimming block, each of the plurality of dimming blocks including at least one respective light source disposed on a first side of the substrate; and a plurality of driving devices disposed on the first side of the substrate and including a first driving device disposed in the first dimming block and a second driving device disposed in the second dimming block, each driving device of the plurality of driving devices being configured to provide a driving current to the at least one respective light source included in a respective one of the plurality of dimming blocks, wherein the first driving device and the second driving device are disposed at relatively different positions respectively within the first dimming block and the second dimming block.

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