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公开(公告)号:US20240324206A1
公开(公告)日:2024-09-26
申请号:US18581174
申请日:2024-02-19
Applicant: Samsung Electronics Co., Ltd.
Inventor: Byungik YOO , Seungbeom KO , Taemok GWON , Changjin SON , Chadong YEO , Seulji LEE , Seungmin LEE
Abstract: A nonvolatile memory device includes a substrate including a memory cell region and a connection region; a mold structure including a plurality of gate electrodes and a plurality of mold insulating layers alternately stacked; a channel structure passing through the mold structure in the memory cell region; a first cell contact passing through the mold structure in the connection region, connected to a first gate electrode and electrically disconnected from a second gate electrode; a plurality of support structures surrounding the first cell contact planarly in the connection region and extending through the mold structure; and a dam structure located between the first cell contact and the second gate electrode in the connection region and apart from the first cell contact with an insulating ring therebetween.
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公开(公告)号:US20240222267A1
公开(公告)日:2024-07-04
申请号:US18396813
申请日:2023-12-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Byoungil LEE , Seungbeom KO , Jongyoon CHOI
IPC: H01L23/522 , G11C16/04 , H01L23/528 , H01L25/065 , H10B41/10 , H10B41/27 , H10B41/35 , H10B43/10 , H10B43/27 , H10B43/35 , H10B80/00
CPC classification number: H01L23/5226 , G11C16/0483 , H01L23/5283 , H01L25/0652 , H10B41/10 , H10B41/27 , H10B41/35 , H10B43/10 , H10B43/27 , H10B43/35 , H10B80/00 , H01L2225/06506
Abstract: A semiconductor device comprising: a stack structure on a substrate including gate electrodes and insulating layers alternately stacked; a first through via extending through the stack structure; and a second through via spaced apart from the first through via, wherein the second through via extends through the stack structure, wherein the second through via is electrically connected to a first gate electrode that is farthest one among the gate electrodes from the substrate in the vertical direction, wherein a gate pad is on and contacts the first gate electrode, and the first through via includes: a vertical pattern; first and second protrusions that protrude from the vertical pattern, wherein the first protrusion overlaps a portion of the first gate electrode in the horizontal direction; and the second protrusion overlaps a second gate electrode in the horizontal direction, wherein the second gate electrode is spaced apart from the second through via.
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