公开(公告)号：US20230175974A1

公开(公告)日：2023-06-08

申请号：US17940308

申请日：2022-09-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junghoon CHOI ,  Yunsong JEONG ,  Sangyong YU

IPC: G01N21/88 ,  G01N21/956

CPC classification number: G01N21/8806 ,  G01N21/956 ,  G01N2021/95676

Abstract: An inspection system includes a stage unit configured to load a blank mask thereon. A side illumination unit, which is disposed to face a side surface of the blank mask and includes a plurality of LEDs, is provided. A camera disposed adjacent to the blank mask is provided. An inspection light beam irradiated from the side illumination unit toward the side surface of the blank mask is substantially parallel to an upper surface of the blank mask.