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公开(公告)号:US20250151258A1
公开(公告)日:2025-05-08
申请号:US18926393
申请日:2024-10-25
Applicant: Samsung Electronics Co., Ltd.
Inventor: JINBUM KIM , DAE-JIN NAM , Hyojin Park , Soomin SON , GUIFU YANG , Kyeonggyu LEE , Inhae ZOH
IPC: H10B12/00
Abstract: Disclosed is a semiconductor device comprising a substrate that includes a device isolation pattern and an active region, a bit line that extends in a first direction on the substrate, a semiconductor pattern on the bit line, a growth mask layer on the bit line and having a sidewall in contact with the semiconductor pattern, a word line on the bit line and extending in a second direction that intersects the first direction, and a gate dielectric pattern between the word line and the semiconductor pattern. A top surface of the growth mask layer is at a level higher than that of a bottom surface of the semiconductor pattern.
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公开(公告)号:US20240421232A1
公开(公告)日:2024-12-19
申请号:US18586125
申请日:2024-02-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Suk YANG , Sung-Hwan JANG , Do Hee KIM , Jin Bum KIM , Sung Uk JANG , Inhae ZOH
IPC: H01L29/786 , H01L29/06 , H01L29/423 , H01L29/66 , H01L29/78
Abstract: A semiconductor device includes a lower pattern extending in a first direction, a plurality of wire patterns spaced apart from the lower pattern in a second direction on the lower pattern, and a gate electrode surrounding the plurality of wire patterns and extending in a third direction, on the lower pattern. Each of the plurality of wire patterns includes a transition metal dichalcogenide (TMD) material. Each of the plurality of wire patterns includes a pair of first areas protruding from sidewalls of the gate electrode in the first direction and a second area between the first areas. A phase of the first area is different from a phase of the second area.
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