公开(公告)号：US20190025226A1

公开(公告)日：2019-01-24

申请号：US16037088

申请日：2018-07-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Akio ISHIKAWA ,  Ken OZAWA ,  Kwang-Soo KIM ,  Sean PARK ,  Mitsunori NUMATA

IPC: G01N21/88 ,  G02B27/42 ,  G06T7/00

CPC classification number: G01N21/8806 ,  G01N21/956 ,  G01N2201/06 ,  G02B27/42 ,  G06T7/0002 ,  G06T2207/10152

Abstract: An imaging apparatus includes an illumination light source to output an illumination light, an illumination optical system to transmit the illumination light toward a sample, an imaging optical system to transmit light reflected from the sample, a stage to move the sample in a predetermined transfer direction, and a photographing unit to receive the reflected light. The imaging apparatus may include one or more diffraction grids located at conjugate focal planes of the sample. The operation of the photographing unit may be synchronized with a movement of the sample by the stage to obtain an image in accordance with a time delay integration method.