公开(公告)号：US20150101535A1

公开(公告)日：2015-04-16

申请号：US14188017

申请日：2014-02-24

Applicant: Samsung Display Co., Ltd.

Inventor： Sung-Yong Lee ,  Sung-Hun Key ,  In-Kyo Kim ,  Cheol-Min Jang ,  Myung-Soo Huh

IPC: C23C16/455 ,  C23C16/50 ,  C23C16/52

CPC classification number: C23C16/45563 ,  C23C16/452 ,  C23C16/45536 ,  C23C16/45551

Abstract: A vapor deposition apparatus includes a substrate mount unit on which a substrate is mounted, a plurality of first nozzle units which injects a first raw material in a direction of the substrate mount unit, a plurality of second nozzle units which is alternately disposed with the plurality of first nozzle units and injects a second raw material in the direction of the substrate mount unit, and a plasma module unit which supplies the second raw material to the plurality of second nozzle units. The second raw material is a radical, and the substrate mount unit includes an electrostatic generation part.

Abstract translation: 一种气相沉积设备，包括：基板安装单元，其上安装有基板;多个第一喷嘴单元，其在所述基板安装单元的方向上注入第一原料;多个第二喷嘴单元，其与所述多个第一喷嘴单元交替布置; 的第一喷嘴单元，并且在所述基板安装单元的方向上注入第二原料;以及等离子体模块单元，其将所述第二原料供给到所述多个第二喷嘴单元。 第二原料是自由基，基板安装单元包括静电发生部。

公开(公告)号：US09057125B2

公开(公告)日：2015-06-16

申请号：US13710310

申请日：2012-12-10

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Choel-Min Jang ,  Myung-Soo Huh ,  Suk-Won Jung ,  Sung-Yong Lee ,  Cheol-Rae Jo ,  In-Kyo Kim ,  Sung-Hun Key

IPC: B01F3/04 ,  C23C16/00 ,  C23C16/448

CPC classification number: C23C16/00 ,  B01F3/04 ,  C23C16/4481 ,  C23C16/4482

Abstract: A canister includes an accommodation portion for accommodating a liquid material; an outlet pipe that is connected to the accommodation portion so as to discharge a gas material obtained by vaporizing the liquid material; a blocking cover that is connected to an upper surface of the accommodation portion; and a plurality of baffle plates that are disposed in the accommodation portion and are spaced apart from each other. The canister further includes a restrictor including a main body member that is disposed between the plurality of baffle plates and the blocking cover and is connected to an internal surface of the accommodation portion, an extension member extending from the main body member, and a through portion that is formed through the main body member and the extension member. A deposition procedure using the canister is efficiently performed and characteristics of a deposition layer are easily improved.

Abstract translation: 罐包括用于容纳液体材料的容纳部分; 出口管，其连接到容纳部分，以排出通过汽化液体材料获得的气体材料; 阻挡盖，其连接到所述容纳部的上表面; 以及设置在容纳部分中并彼此间隔开的多个挡板。 所述罐还包括限制器，所述限制器包括主体部件，所述主体部件设置在所述多个挡板和所述阻挡盖之间，并且连接到所述容纳部的内表面，从所述主体部件延伸的延伸部件， 其通过主体构件和延伸构件形成。 可以有效地进行使用罐的沉积工序，容易地提高沉积层的特性。