公开(公告)号：US10907245B2

公开(公告)日：2021-02-02

申请号：US16457722

申请日：2019-06-28

Applicant: Samsung Display Co., Ltd.

Inventor： Min-Gyu Seo ,  Sang-Jin Han ,  Cheol-Lae Roh ,  Jae-Hong Ahn

IPC: C23C14/24 ,  C23C14/26 ,  C23C16/448

Abstract: A linear evaporation source and a deposition apparatus having the same are disclosed. In one aspect, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.

公开(公告)号：US10364488B2

公开(公告)日：2019-07-30

申请号：US15884236

申请日：2018-01-30

Applicant: Samsung Display Co., Ltd.

Inventor： Min-Gyu Seo ,  Sang-Jin Han ,  Cheol-Lae Roh ,  Jae-Hong Ahn

IPC: C23C14/24 ,  C23C14/26 ,  C23C16/448

Abstract: A linear evaporation source and a deposition apparatus having the same are disclosed. In one aspect, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.

公开(公告)号：US10081867B2

公开(公告)日：2018-09-25

申请号：US14484691

申请日：2014-09-12

Applicant: Samsung Display Co., Ltd.

Inventor： Min-Gyu Seo ,  Sang-Jin Han ,  Cheol-Lae Roh ,  Jae-Hong Ahn

IPC: C23C14/26 ,  C23C16/448 ,  C23C14/24

CPC classification number: C23C14/243 ,  C23C14/26 ,  C23C16/4485

Abstract: A linear evaporation source and a deposition apparatus having the same are disclosed. In one embodiment, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.