公开(公告)号：US20210358791A1

公开(公告)日：2021-11-18

申请号：US17172056

申请日：2021-02-09

Applicant: Samsung Display Co., Ltd.

Inventor： Juhee Lee ,  Cheollae Roh ,  Soo Beom Jo ,  Myungsoo Huh ,  Voronov Alexander ,  Jiwon Yeon ,  Haeyoung Yoo ,  Yongmun Chang

IPC: H01L21/683 ,  H02N13/00 ,  B23Q3/15

Abstract: An electrostatic chuck fixes a substrate and includes a first area and a second area adjacent to the first area. The electrostatic chuck includes a first electrode portion disposed in the first area and a second electrode portion disposed in the second area. The first electrode portion has a first width, and the second electrode portion has a second width smaller than the first width.

公开(公告)号：US11574833B2

公开(公告)日：2023-02-07

申请号：US17172056

申请日：2021-02-09

Applicant: Samsung Display Co., Ltd.

Inventor： Juhee Lee ,  Cheollae Roh ,  Soo Beom Jo ,  Myungsoo Huh ,  Voronov Alexander ,  Jiwon Yeon ,  Haeyoung Yoo ,  Yongmun Chang

IPC: H02N13/00 ,  H01L21/683 ,  B23Q3/15

Abstract: An electrostatic chuck fixes a substrate and includes a first area and a second area adjacent to the first area. The electrostatic chuck includes a first electrode portion disposed in the first area and a second electrode portion disposed in the second area. The first electrode portion has a first width, and the second electrode portion has a second width smaller than the first width.