公开(公告)号：US20140349433A1

公开(公告)日：2014-11-27

申请号：US14456930

申请日：2014-08-11

Applicant: Samsung Display Co., Ltd.

Inventor： Seung-Ho Choi ,  Hyun Choi ,  Sung-Gon Kim ,  Min-Gyu Seo

IPC: H01L51/00 ,  H01L51/56

CPC classification number: H01L51/0003 ,  B05B1/14 ,  B05B12/36 ,  B05B13/04 ,  H01L51/0004 ,  H01L51/56

Abstract: A device for depositing an organic material includes a substrate; a mask having an opening portion and a shield portion; a fixing member for fixing the substrate and the mask to each other; a deposition source comprising a plurality of nozzles arranged in a first direction and configured to spray the organic material; and a plurality of shield plates near the plurality of nozzles on the deposition source. An angle θ between the substrate and a line extended from a distal end of one of the nozzles to a center of a distal end of a corresponding one of the shield plates is greater than or equal to a taper angle Φ of the shield portion of the mask.

Abstract translation: 用于沉积有机材料的装置包括：基板; 具有开口部分和屏蔽部分的掩模; 用于将所述基板和所述掩模彼此固定的固定构件; 沉积源，包括沿第一方向布置并被配置为喷射有机材料的多个喷嘴; 以及在沉积源上的多个喷嘴附近的多个屏蔽板。 角度和角度 在基板与从一个喷嘴的远端延伸到对应的一个屏蔽板的远端的中心的线之间的距离大于或等于掩模的屏蔽部分的锥角Φ。

公开(公告)号：US10689749B2

公开(公告)日：2020-06-23

申请号：US13797632

申请日：2013-03-12

Applicant: Samsung Display Co., Ltd.

Inventor： Min Ho Kim ,  Seong Ho Jeong ,  Hyun Choi

IPC: C23C14/24 ,  C23C14/26

Abstract: A linear evaporation source is disclosed. In one aspect, the source includes a crucible storing an evaporated material, a heater unit surrounding the crucible and heating the crucible, and a plurality of lateral reflectors surrounding a lateral surface of the heater unit. Each of the lateral reflectors includes a first reflector combined with the heater unit while being spaced apart from the heater unit and having a plurality of first openings and a second reflector movably combined with the first reflector and having a second opening. Open ratios of the lateral reflectors are independently adjusted to control a temperature of the crucible according to areas of the crucible. Thus, deposition uniformity of the linear evaporation source is enhanced.

公开(公告)号：US20140109829A1

公开(公告)日：2014-04-24

申请号：US13797632

申请日：2013-03-12

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Min Ho Kim ,  Seong Ho Jeong ,  Hyun Choi

IPC: C23C16/448

Abstract: A linear evaporation source is disclosed. In one aspect, the source includes a crucible storing an evaporated material, a heater unit surrounding the crucible and heating the crucible, and a plurality of lateral reflectors surrounding a lateral surface of the heater unit. Each of the lateral reflectors includes a first reflector combined with the heater unit while being spaced apart from the heater unit and having a plurality of first openings and a second reflector movably combined with the first reflector and having a second opening. Open ratios of the lateral reflectors are independently adjusted to control a temperature of the crucible according to areas of the crucible. Thus, deposition uniformity of the linear evaporation source is enhanced.

Abstract translation: 公开了一种线性蒸发源。 在一个方面，源包括存储蒸发材料的坩埚，围绕坩埚加热坩埚的加热器单元和围绕加热器单元的侧表面的多个侧向反射器。 每个横向反射器包括与加热器单元组合的第一反射器，同时与加热器单元间隔开并且具有多个第一开口和与第一反射器可移动地组合并具有第二开口的第二反射器。 独立地调整横向反射器的开放比以根据坩埚的面积来控制坩埚的温度。 因此，提高了线性蒸发源的沉积均匀性。

公开(公告)号：US09515263B2

公开(公告)日：2016-12-06

申请号：US14456930

申请日：2014-08-11

Applicant: Samsung Display Co., Ltd.

Inventor： Seung-Ho Choi ,  Hyun Choi ,  Sung-Gon Kim ,  Min-Gyu Seo

IPC: H01L51/00 ,  B05B13/04 ,  B05B15/04 ,  H01L51/56 ,  B05B1/14

CPC classification number: H01L51/0003 ,  B05B1/14 ,  B05B12/36 ,  B05B13/04 ,  H01L51/0004 ,  H01L51/56

Abstract: A device for depositing an organic material includes a substrate; a mask having an opening portion and a shield portion; a fixing member for fixing the substrate and the mask to each other; a deposition source comprising a plurality of nozzles arranged in a first direction and configured to spray the organic material; and a plurality of shield plates near the plurality of nozzles on the deposition source. An angle θ between the substrate and a line extended from a distal end of one of the nozzles to a center of a distal end of a corresponding one of the shield plates is greater than or equal to a taper angle Φ of the shield portion of the mask.

Abstract translation: 用于沉积有机材料的装置包括：基板; 具有开口部分和屏蔽部分的掩模; 用于将所述基板和所述掩模彼此固定的固定构件; 沉积源，包括沿第一方向布置并被配置为喷射有机材料的多个喷嘴; 以及在沉积源上的多个喷嘴附近的多个屏蔽板。 基板与从其中一个喷嘴的远端延伸到对应的一个屏蔽板的远端的中心的线之间的角度θ大于或等于屏蔽部分的屏蔽部分的锥角Φ 面具。

公开(公告)号：US09263709B2

公开(公告)日：2016-02-16

申请号：US14267947

申请日：2014-05-02

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Byung-Chul Lee ,  Dong-Sul Kim ,  Jin-Han Park ,  Hyung-Tag Lim ,  Hyun Choi

IPC: H01L51/52 ,  H01L51/56 ,  H01L51/00

CPC classification number: H01L51/56 ,  H01L51/003 ,  H01L51/0097 ,  H01L51/5256

Abstract: A method of manufacturing a flexible display apparatus includes sequentially forming a flexible substrate, a thin film transistor (TFT), an organic light-emitting diode (OLED) including a first electrode, an intermediate layer, and a second electrode, and a first attachment layer on a carrier substrate, sequentially forming a deposition layer and a second attachment layer on a sealing film, attaching the carrier substrate and the sealing film to each other such that the sealing film covers flexible substrate on the carrier substrate, sealing the first and second attachment layers, laminating the carrier substrate and the sealing film, and separating the sealing film and the flexible substrate from the carrier substrate.

Abstract translation: 柔性显示装置的制造方法包括顺序地形成柔性基板，薄膜晶体管（TFT），包括第一电极，中间层和第二电极的有机发光二极管（OLED）和第一附件 层，在密封膜上顺序地形成沉积层和第二附着层，将载体基板和密封膜彼此附接，使得密封膜覆盖载体基板上的柔性基板，密封第一和第二 附着层，层叠载体基板和密封膜，并将密封膜和柔性基板与载体基板分离。