MEASUREMENT APPARATUS AND METHOD OF OPERATING MEASUREMENT APPARATUS

    公开(公告)号:US20190064499A1

    公开(公告)日:2019-02-28

    申请号:US16114449

    申请日:2018-08-28

    Abstract: In a measurement apparatus, a first pupil is capable of transmitting first light of a first wavelength band, and a second pupil is capable of transmitting second light of a second wavelength band. An imaging device includes a plurality of first pixels generating first pixel signals based on third light of a third wavelength band transmitted through a first optical filter that is capable of transmitting the third light. The imaging device further includes a plurality of second pixels generating second pixel signals based on fourth light of a fourth wavelength band transmitted through a second optical filter that is capable of transmitting the fourth light. A light source outputs illumination light including only fifth light of a fifth wavelength band and sixth light of a sixth wavelength band not overlapping the fifth wavelength band.

    IMAGING DEVICE, IMAGING METHOD, AND INFORMATION STORAGE DEVICE

    公开(公告)号:US20200077010A1

    公开(公告)日:2020-03-05

    申请号:US16674659

    申请日:2019-11-05

    Abstract: An imaging device includes: an optical filter 12 that divides a pupil of an imaging optical system 10 into a first pupil that transmits visible light and a second pupil that transmits invisible light; an image sensor 20 that is sensitive to the visible light and the invisible light; and a processor that generates a first pupil image as an image of the visible light and a second pupil image as an image of the invisible light based on an image captured by the image sensor 20, and detects a phase difference between the first pupil image and the second pupil image.

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