公开(公告)号：US20240085333A1

公开(公告)日：2024-03-14

申请号：US18452494

申请日：2023-08-18

Applicant: NOVA LTD.

Inventor： Elad Schleifer ,  Yonatan Oren ,  Amir Shayari ,  Eyal Hollander ,  Valery Deich ,  Shimon YALOV ,  Gilad BARAK

IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44

CPC classification number: G01N21/65 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/4412 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.

公开(公告)号：US20250130172A1

公开(公告)日：2025-04-24

申请号：US18936790

申请日：2024-11-04

Applicant: NOVA LTD.

Inventor： Elad Schleifer ,  Yonatan Oren ,  Amir Shayari ,  Eyal Hollander ,  Valery Deich ,  Shimon YALOV ,  Gilad Barak

IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44

Abstract: An optical measurement system, which include an illumination path that is configured to illuminate an illuminated area of a sample; a collection path configured to collect illumination emitted from the illuminated area as a result of the illumination of the illuminated area; a spatial filter that is tunable; a Raman detector; and wherein the spatial filter is positioned upstream to the Raman detector, and is configured to spatially filter the illumination emitted from the illuminated area to provide spatially filtered illumination. The Raman detector is configured to receive the spatially filtered illumination and to generate one or more Raman spectra.

公开(公告)号：US20230280283A1

公开(公告)日：2023-09-07

申请号：US18043331

申请日：2021-08-27

Applicant: NOVA LTD.

Inventor： Igor TUROVETS ,  Shimon YALOV ,  Alex Shichtman ,  Misha Matusovsky ,  Shachar PAZ

IPC: G01N21/95 ,  G01N35/00 ,  G06N20/00

CPC classification number: G01N21/9501 ,  G01N35/0099 ,  G06N20/00

Abstract: A method for optical metrology of a sample, the method may include illuminating areas of the sample by sets of pulses of different wavelengths, during a movement of a variable speed of the sample; collecting light reflected from the sample, as a result of the illuminating, to provide sets of frames, each set of frames comprises partially overlapping frames associated with the different wavelengths; and processing the frames to provide optical metrology results indicative of one or more evaluated parameters of elements of the areas of the sample; wherein the processing is based on a mapping between the sets of frames and reference measurements obtained by an other optical metrology process that exhibits a higher spectral resolution than a spectral resolution obtained by the illuminating and the collecting.