公开(公告)号：US20230280283A1

公开(公告)日：2023-09-07

申请号：US18043331

申请日：2021-08-27

Applicant: NOVA LTD.

Inventor： Igor TUROVETS ,  Shimon YALOV ,  Alex Shichtman ,  Misha Matusovsky ,  Shachar PAZ

IPC: G01N21/95 ,  G01N35/00 ,  G06N20/00

CPC classification number: G01N21/9501 ,  G01N35/0099 ,  G06N20/00

Abstract: A method for optical metrology of a sample, the method may include illuminating areas of the sample by sets of pulses of different wavelengths, during a movement of a variable speed of the sample; collecting light reflected from the sample, as a result of the illuminating, to provide sets of frames, each set of frames comprises partially overlapping frames associated with the different wavelengths; and processing the frames to provide optical metrology results indicative of one or more evaluated parameters of elements of the areas of the sample; wherein the processing is based on a mapping between the sets of frames and reference measurements obtained by an other optical metrology process that exhibits a higher spectral resolution than a spectral resolution obtained by the illuminating and the collecting.