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公开(公告)号：US20220209506A1
公开(公告)日：2022-06-30
申请号：US17364287
申请日：2021-06-30
Applicant: Lumentum Operations LLC
Inventor： Benjamin KESLER , Ajit Vijay BARVE , Jun YANG , Guowei ZHAO , Matthew Glenn PETERS
Abstract: A method of forming a VCSEL device cavity using a multiphase growth sequence includes forming a first mirror over a substrate, forming a tunnel junction over the first mirror, forming an oxidation aperture (OA) layer over the tunnel junction, forming a p-doped layer over the OA layer, forming an active region over the p-doped layer, forming a second mirror over the active region, and forming a contact layer over the second mirror. The first mirror, the tunnel junction, the OA layer, and the p-doped layer are formed using a metal-organic chemical vapor deposition (MOCVD) process during an MOCVD phase of the multiphase growth sequence. The active region, the second mirror, and the contact layer are formed using a molecular beam epitaxy (MBE) process during an MBE phase of the multiphase growth sequence.
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公开(公告)号：US20230420918A1
公开(公告)日：2023-12-28
申请号：US18464662
申请日：2023-09-11
Applicant: Lumentum Operations LLC
Inventor： Benjamin KESLER
CPC classification number: H01S5/18341 , H01S5/3416 , H01S5/18327 , H01S5/18397 , H01S5/18313 , H01S5/0421 , H01S5/423 , H01S5/3095 , H01S5/04254 , H01S5/04257 , H01S5/04256 , H01S5/1833
Abstract: A vertical cavity surface emitting laser (VCSEL) may include an epitaxial structure that includes a first active layer, a second active layer, and a tunnel junction therebetween. The VCSEL may include a set of contacts that are electrically connected to the epitaxial structure. The set of contacts may include three or more contacts, and the set of contacts may be electrically separated from each other on the VCSEL. At least one contact, of the set of contacts, may be electrically connected to the epitaxial structure at a depth between the first active layer and the second active layer.
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公开(公告)号：US20230102622A1
公开(公告)日：2023-03-30
申请号：US17453060
申请日：2021-11-01
Applicant: Lumentum Operations LLC
Inventor： Benjamin KESLER , Guowei ZHAO
Abstract: A vertical cavity surface emitting laser (VCSEL) device may include a substrate layer and a first set of epitaxial layers, for a first VCSEL, disposed on the substrate layer. The first set of epitaxial layers may include a first set of mirrors and at least one first active layer. The VCSEL device may include a second set of epitaxial layers, for a second VCSEL, disposed on the first set of epitaxial layers for the first VCSEL. The second set of epitaxial layers may include a second set of mirrors and at least one second active layer. The first VCSEL and the second VCSEL may be configured to emit light in a light emission direction. The at least one first active layer of the first VCSEL may be offset in the light emission direction from the at least one second active layer of the second VCSEL.
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公开(公告)号：US20210367407A1
公开(公告)日：2021-11-25
申请号：US16948763
申请日：2020-09-30
Applicant: Lumentum Operations LLC
Inventor： Jun YANG , Guowei ZHAO , Matthew Glenn PETERS , Eric R. HEGBLOM , Ajit Vijay BARVE , Benjamin KESLER
Abstract: A VCSEL may include an n-type substrate layer and an n-type bottom mirror on a surface of the n-type substrate layer. The VCSEL may include an active region on the n-type bottom mirror and a p-type layer on the active region. The VCSEL may include an oxidation layer over the active region to provide optical and electrical confinement of the VCSEL. The VCSEL may include a tunnel junction over the p-type layer to reverse a carrier type of an n-type top mirror. Either the oxidation layer is on or in the p-type layer and the tunnel junction is on the oxidation layer, or the tunnel junction is on the p-type layer and the oxidation layer is on the tunnel junction. The VCSEL may include the n-type top mirror over the tunnel junction, a top contact layer over the n-type top mirror, and a top metal on the top contact layer.
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公开(公告)号：US20250079800A1
公开(公告)日：2025-03-06
申请号：US18545914
申请日：2023-12-19
Applicant: Lumentum Operations LLC
Inventor： Eric R. HEGBLOM , Richa DUBEY , Benjamin KESLER
IPC: H01S5/183
Abstract: A vertical-cavity surface-emitting laser (VCSEL) may include a first top mirror structure over a cavity region. The VCSEL may include a grating layer over the first top mirror structure. The grating layer may comprise a plurality of oxidized regions that form a grating structure in the grating layer. The grating structure may be associated with polarization of output light emitted by the VCSEL. The surface of the grating layer may be a planar surface.
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Patent Agency Ranking
公开(公告)号：US20230094127A1
公开(公告)日：2023-03-30
申请号：US18061593
申请日：2022-12-05
Applicant: Lumentum Operations LLC
Inventor： Ajit Vijay BARVE , Benjamin KESLER , Matthew Glenn PETERS
Abstract: A closely spaced emitter array may include a first emitter comprising a first plurality of structures and a second emitter, adjacent to the first emitter, comprising a second plurality of structures. The first emitter and the second emitter may be configured in the closely spaced emitter array such that different types of structures between the first plurality of structures and the second plurality of structures do not overlap while maintaining close spacing between the first emitter and the second emitter.
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公开(公告)号：US20220085572A1
公开(公告)日：2022-03-17
申请号：US17247660
申请日：2020-12-18
Applicant: Lumentum Operations LLC
Inventor： John Michael MILLER , Lijun ZHU , Huanlin ZHU , Benjamin KESLER , Ajit Vijay BARVE
Abstract: In some implementations, an emitter module may include an emitter layer including a first emitter array configured to produce a first beam that provides flood illumination, and a second emitter array configured to produce a second beam that provides spot illumination. The emitter module may include a first optics layer, positioned in front of the emitter layer, that includes a first collimating lens positioned in front of the first emitter array, and a second collimating lens positioned in front of the second emitter array. The emitter module may include a second optics layer, positioned in front of the first optics layer, that includes an optical diffuser positioned in front of the first collimating lens, and a beamsplitter grating positioned in front of the second collimating lens.
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公开(公告)号：US20240241388A1
公开(公告)日：2024-07-18
申请号：US18185845
申请日：2023-03-17
Applicant: Lumentum Operations LLC
Inventor： James CHEN , Michael MILLER , Lijun ZHU , Vincent V. WONG , Russell Latham , Benjamin KESLER
CPC classification number: G02B27/0955 , G01B11/254 , G02B27/0025 , G02B27/0916 , G02B27/30 , G02B27/4233
Abstract: In some implementations, a dot projector optic may include a collimating lens; a fisheye lens; and a dot aberration correction element disposed between the collimating lens and the fisheye lens. An input to the fisheye lens, from the dot aberration correction element, may be associated with a first field of view angle. An output from the fisheye lens may be associated with a second field of view angle that is larger than the first field of view angle.
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公开(公告)号：US20240136798A1
公开(公告)日：2024-04-25
申请号：US18399844
申请日：2023-12-29
Applicant: Lumentum Operations LLC
Inventor： Benjamin KESLER
CPC classification number: H01S5/18397 , H01S5/18305 , H01S5/18313 , H01S5/18388 , H01S5/2081 , H01S5/3095 , H01S5/3416 , H01S5/426 , H01S5/183 , H01S5/18394
Abstract: In some implementations, a vertical cavity surface emitting laser (VCSEL) device includes a substrate layer and a first set of epitaxial layers for a bottom-emitting VCSEL disposed on the substrate layer. The first set of epitaxial layers may include a first set of mirrors and at least one first active layer. The VCSEL device may include a second set of epitaxial layers for a top-emitting VCSEL disposed on the first set of epitaxial layers for the bottom-emitting VCSEL. The second set of epitaxial layers may include a second set of mirrors and at least one second active layer. The top-emitting VCSEL and the bottom-emitting VCSEL may be configured to emit light in opposite light emission directions.
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10.发明公开公开(公告)号：US20230238775A1
公开(公告)日：2023-07-27
申请号：US17654716
申请日：2022-03-14
Applicant: Lumentum Operations LLC
Inventor： Jun YANG , Matthew Glenn PETERS , Guowei ZHAO , Benjamin KESLER , Eric R. HEGBLOM
CPC classification number: H01S5/18397 , H01S5/18361 , H01S5/3416 , H01S5/18311 , H01S5/18305
Abstract: A multi junction vertical cavity surface emitting laser (VCSEL) may comprise a substrate, a top contact, and a stack comprising a set of layers formed between the substrate and the top contact. In some implementations, the set of layers formed between the substrate and the top contact may comprise a cavity comprising a first active region, a second active region, and a tunnel junction connecting the first active region and the second active region, a first distributed Bragg reflector (DBR) pair comprising a high-contrast p-type DBR (p-DBR) and a low-contrast p-DBR between the cavity and the top contact, and a second DBR pair comprising a high-contrast n-type DBR (n-DBR) and a low-contrast n-DBR between the cavity and the substrate. The low-contrast p-DBR and the low-contrast n-DBR are located on an inner side of the stack, and the high-contrast p-DBR and the high-contrast n-DBR are located on an outer side of the stack.
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