公开(公告)号：US20200211879A1

公开(公告)日：2020-07-02

申请号：US16727248

申请日：2019-12-26

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Keon Jae LEE ,  Han Eol LEE ,  Tae Jin KIM ,  Jung Ho SHIN ,  Sang Hyun PARK

IPC: H01L21/677 ,  H01L21/683 ,  H01L33/62 ,  B65G47/91

Abstract: The present disclosure provides a method for transfer and assembly of RGB micro-light-emitting diodes using vacuum suction force whereby the vacuum state of micrometer-sized adsorption holes to which micro-light-emitting diodes formed on a mother substrate or a temporary substrate are bonded is controlled selectively, so that only the micro-light-emitting diode devices desired to be detached from the mother substrate or the temporary substrate are detached from the mother substrate or the temporary substrate using vacuum suction force and then transferred to a target substrate

公开(公告)号：US20150224324A1

公开(公告)日：2015-08-13

申请号：US14538154

申请日：2014-11-11

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Keon Jae LEE ,  Myung Hwan Byun ,  Kwi II Park ,  Geon Tae Hwang ,  Chang Kyu Chung

IPC: A61N1/378 ,  B32B38/10 ,  B32B37/24 ,  H02N2/18 ,  A61N1/36

CPC classification number: A61N1/3785 ,  A61N1/0551 ,  A61N1/3605 ,  A61N1/36125 ,  A61N1/3756 ,  B32B38/10 ,  B32B2457/00 ,  B82Y40/00 ,  H01L41/113 ,  H01L41/312 ,  Y10S322/00 ,  Y10S977/948

Abstract: Provided is a method for separating a nanogenerator, which includes laminating a buffer layer on a sacrificial substrate, making a nanogenerator on the buffer layer, laminating a metal layer on the nanogenerator and separating the nanogenerator from the buffer layer.Here, a nanogenerator is separated by using a stress difference between the sacrificial substrate and the metal layer, instead of an existing method in which a nanogenerator is separated from the sacrificial substrate by means of wet etching or the like. In particular, according to a difference between a tensile stress at the metal layer such as nickel and a compressive stress at the lower silicon substrate, the nanogenerator is intactly separated from the silicon oxide layer serving as a buffer layer. Therefore, the nanogenerator may be separated from the sacrificial substrate in a mechanical way, which is safer and more economic in comparison to an existing chemical separation method using an etching solution. Further, it is also possible to avoid a damage of the nanogenerator caused by an etching solution.

Abstract translation: 提供一种分离纳米发生器的方法，其包括在牺牲基板上层叠缓冲层，在缓冲层上形成纳米发生器，在纳米发生器上层压金属层并将纳米发生器与缓冲层分离。 这里，通过使用牺牲基板和金属层之间的应力差来分离纳米发生器，而不是通过湿蚀刻等将纳米发生器与牺牲基板分离的现有方法。 特别地，根据镍等金属层的拉伸应力与下硅基板的压缩应力之间的差异，纳米发生器与作为缓冲层的氧化硅层完全分离。 因此，纳米发生器可以以机械方式与牺牲衬底分离，与使用蚀刻溶液的现有化学分离方法相比，其更安全并且更经济。 此外，还可以避免由蚀刻溶液引起的纳米发生器的损坏。

公开(公告)号：US20200155010A1

公开(公告)日：2020-05-21

申请号：US16202965

申请日：2018-11-28

Applicant: ROBOPRINT CO., LTD ,  KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Jung Kyu PARK ,  Min Su KIM ,  Keon Jae LEE ,  Dae Yong PARK

IPC: A61B5/022 ,  A61B5/00 ,  A61B5/021

Abstract: A pulse sensing module used in a blood pressure measuring device attached to the skin to allow at least one of systolic pressure Psystolic, diastolic pressure Pdiastolic, and blood pressure variation to be measured according to an embodiment of the present disclosure includes a piezoelectric layer that includes a piezoelectric material for generating a piezoelectric effect due to a pulse and a protective layer that is applied to the piezoelectric layer to protect the piezoelectric layer, allows a poling process of applying a high voltage to the first electrode line and the second electrode line formed on the piezoelectric layer to improve the polarity of the piezoelectric material, and has an opening for allowing a portion of the first electrode line and a portion of the second electrode line to be exposed.

公开(公告)号：US20180016403A1

公开(公告)日：2018-01-18

申请号：US15612936

申请日：2017-06-02

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Sang Ouk KIM ,  Hyeong Min JIN ,  Keon Jae LEE ,  Seung Hyun LEE ,  Ju Young KIM

IPC: C08J3/28 ,  B05D1/00

CPC classification number: C08J3/28 ,  B05D1/005 ,  C08J2353/00 ,  C08J2365/00 ,  C08J2383/10 ,  G03F7/0002

Abstract: Provided are a method for manufacturing a nano-pattern including: increasing a temperature of a self-assembling material applied on a substrate through light irradiation to form a self-assembly pattern, and a nano-pattern manufactured thereby. More particularly, the present invention relates to a method for manufacturing a nano-pattern capable of implementing various circuit patterns through simple dragging without using a photoresist pattern or chemical pattern in advance, implementing the nano-pattern on a substrate having a three-dimensional structure such as a flexible substrate as well as a flat substrate, and performing a process without a specific environmental restriction. In addition, the present invention relates to a method for manufacturing a nano-pattern capable of forming a large-area self-assembly pattern within a very short time, that is, several to several ten milliseconds (ms) by instantly irradiating high-energy flash light to instantly perform thermal annealing.