公开(公告)号：US09841512B2

公开(公告)日：2017-12-12

申请号：US14946563

申请日：2015-11-19

Applicant: KLA-Tencor Corporation

Inventor： Ximan Jiang ,  Anatoly Romanovsky ,  Christian Wolters ,  Stephen Biellak ,  Mous Tatarkhanov

IPC: G01T1/24 ,  G01N21/95

CPC classification number: G01T1/24 ,  G01N21/9501

Abstract: An inspection system with radiation-induced false count mitigation includes an illumination source configured to illuminate a sample, a detector assembly comprising an illumination sensor configured to detect illumination from the sample, and one or more radiation sensors configured to detect particle radiation, and control circuitry communicatively coupled to the detector. The control circuitry is configured to perform the steps of determining a set of radiation detection events based on one or more radiation signals received from the radiation sensors, determining a set of imaging events based on the illumination signal received from the illumination sensor, comparing the set of radiation detection events to the set of imaging events to generate a set of coincidence events, wherein the set of coincidence events comprises simultaneous imaging and radiation detection events, and excluding the set of coincidence events from the set of imaging events to generate a set of identified defect sites.

公开(公告)号：US10241217B2

公开(公告)日：2019-03-26

申请号：US15795028

申请日：2017-10-26

Applicant: KLA-Tencor Corporation

Inventor： Ximan Jiang ,  Anatoly Romanovsky ,  Christian Wolters ,  Stephen Biellak ,  Mous Tatarkhanov

IPC: G01T1/24 ,  G01N21/95

Abstract: An inspection system with radiation-induced false count mitigation includes a radiation count controller coupled to one or more radiation sensors positioned proximate to an illumination sensor oriented to detect illumination from a sample. The radiation count controller may identify a set of radiation detection events based on radiation signals received from the radiation sensors during operation of the illumination sensor. The inspection system may further include an inspection controller to identify a set of illumination detection events based on an illumination signal, identify one or more features on the sample based on the set of illumination detection events, receive the set of radiation detection events from the radiation count controller, compare the set of radiation detection events to the set of illumination detection events to identify a set of coincidence events, and refine the one or more identified features on the sample based on the set of coincidence events.

公开(公告)号：US20180045837A1

公开(公告)日：2018-02-15

申请号：US15795028

申请日：2017-10-26

Applicant: KLA-Tencor Corporation

Inventor： Ximan Jiang ,  Anatoly Romanovsky ,  Christian Wolters ,  Stephen Biellak ,  Mous Tatarkhanov

IPC: G01T1/24 ,  G01N21/95

CPC classification number: G01T1/24 ,  G01N21/9501

Abstract: An inspection system with radiation-induced false count mitigation includes a radiation count controller coupled to one or more radiation sensors positioned proximate to an illumination sensor oriented to detect illumination from a sample. The radiation count controller may identify a set of radiation detection events based on radiation signals received from the radiation sensors during operation of the illumination sensor. The inspection system may further include an inspection controller to identify a set of illumination detection events based on an illumination signal, identify one or more features on the sample based on the set of illumination detection events, receive the set of radiation detection events from the radiation count controller, compare the set of radiation detection events to the set of illumination detection events to identify a set of coincidence events, and refine the one or more identified features on the sample based on the set of coincidence events.

公开(公告)号：US09460886B2

公开(公告)日：2016-10-04

申请号：US14614088

申请日：2015-02-04

Applicant: KLA-Tencor Corporation

Inventor： Ximan Jiang ,  Stephen Biellak ,  John Fielden

IPC: H01J40/14 ,  H01J31/26 ,  G01N21/88 ,  H01J29/46

CPC classification number: H01J31/26 ,  G01N21/88 ,  H01J29/46

Abstract: An electron-bombarded detector for detecting low light signals includes a vacuum tube structure defining a cylindrical vacuum tube chamber, a photocathode disposed at a first end of the vacuum tube chamber, a sensor disposed at a second end of the vacuum tube chamber, ring electrodes disposed in the vacuum tube chamber for generating an electric field that accelerates emitted photoelectrons toward the sensor, and a magnetic field generator configured to generate a symmetric magnetic field that applies a focusing lens effect on the photoelectrons. The ring electrodes and magnetic field generator are operating using one of a reduced distance focusing approach and an acceleration/deceleration approach such that the photoelectrons have a landing energy below 2 keV. The use of reflective mode photocathodes is enabled using either multi-pole deflector coils, or ring electrodes formed by segmented circular electrode structures. Large angle deflections are achieved using magnetic or electrostatic deflectors.

Abstract translation: 用于检测低光信号的电子轰击检测器包括限定圆柱形真空管室的真空管结构，设置在真空管室的第一端的光电阴极，设置在真空管室的第二端的传感器，环形电极 设置在真空管室中，用于产生将发射的光电子朝向传感器加速的电场;以及磁场发生器，被配置为产生对光电子产生聚焦透镜效应的对称磁场。 环形电极和磁场发生器使用减小的距离聚焦方法和加速/减速方法之一进行操作，使得光电子具有低于2keV的着陆能量。 使用反射模式光电阴极可以使用多极偏转线圈或由分段圆形电极结构形成的环形电极。 使用磁性或静电偏转器实现大角度偏转。

公开(公告)号：US09666419B2

公开(公告)日：2017-05-30

申请号：US13957890

申请日：2013-08-02

Applicant: KLA-Tencor Corporation

Inventor： Ximan Jiang ,  Qing Li ,  Stephen Biellak

IPC: H01J40/16 ,  H01J31/50

CPC classification number: H01J40/16 ,  H01J31/50

Abstract: The disclosure is directed to image intensifier tube designs for field curvature aberration correction and ion damage reduction. In some embodiments, electrodes defining an acceleration path from a photocathode to a scintillating screen are configured to provide higher acceleration for off-axis electrons along at least a portion of the acceleration path. Off-axis electrons and on-axis electrons are accordingly focused on the scintillating screen with substantial uniformity to prevent or reduce field curvature aberration. In some embodiments, the electrodes are configured to generate a repulsive electric field near the scintillating screen to prevent secondary electrons emitted or deflected by the scintillating screen from flowing towards the photocathode and forming damaging ions.

公开(公告)号：US20160334516A1

公开(公告)日：2016-11-17

申请号：US14946563

申请日：2015-11-19

Applicant: KLA-Tencor Corporation

Inventor： Ximan Jiang ,  Anatoly Romanovsky ,  Christian Wolters ,  Stephen Biellak

IPC: G01T1/208 ,  G01T1/24

CPC classification number: G01T1/24 ,  G01N21/9501

Abstract: An inspection system with radiation-induced false count mitigation includes an illumination source configured to illuminate a sample, a detector assembly comprising an illumination sensor configured to detect illumination from the sample, and one or more radiation sensors configured to detect particle radiation, and control circuitry communicatively coupled to the detector. The control circuitry is configured to perform the steps of determining a set of radiation detection events based on one or more radiation signals received from the radiation sensors, determining a set of imaging events based on the illumination signal received from the illumination sensor, comparing the set of radiation detection events to the set of imaging events to generate a set of coincidence events, wherein the set of coincidence events comprises simultaneous imaging and radiation detection events, and excluding the set of coincidence events from the set of imaging events to generate a set of identified defect sites.

Abstract translation: 具有辐射诱导的假计数减轻的检查系统包括被配置为照亮样本的照明源，检测器组件，包括被配置为检测来自样品的照明的照明传感器，以及被配置为检测粒子辐射的一个或多个辐射传感器，以及控制电路 通信地耦合到检测器。 控制电路被配置为执行以下步骤：基于从辐射传感器接收的一个或多个辐射信号来确定一组辐射检测事件，基于从照明传感器接收的照明信号确定一组成像事件，将该组 的辐射检测事件发生到所述一组成像事件以产生一组重合事件，其中所述一致事件包括同时成像和辐射检测事件，并且从所述一组成像事件中排除所述一致事件组合以产生一组 发现缺陷点。

公开(公告)号：US20160027605A1

公开(公告)日：2016-01-28

申请号：US14614088

申请日：2015-02-04

Applicant: KLA-Tencor Corporation

Inventor： Ximan Jiang ,  Stephen Biellak ,  John Fielden

IPC: H01J31/26 ,  G01N21/88 ,  H01J29/46

CPC classification number: H01J31/26 ,  G01N21/88 ,  H01J29/46

Abstract: An electron-bombarded detector for detecting low light signals includes a vacuum tube structure defining a cylindrical vacuum tube chamber, a photocathode disposed at a first end of the vacuum tube chamber, a sensor disposed at a second end of the vacuum tube chamber, ring electrodes disposed in the vacuum tube chamber for generating an electric field that accelerates emitted photoelectrons toward the sensor, and a magnetic field generator configured to generate a symmetric magnetic field that applies a focusing lens effect on the photoelectrons. The ring electrodes and magnetic field generator are operating using one of a reduced distance focusing approach and an acceleration/deceleration approach such that the photoelectrons have a landing energy below 2 keV. The use of reflective mode photocathodes is enabled using either multi-pole deflector coils, or ring electrodes formed by segmented circular electrode structures. Large angle deflections are achieved using magnetic or electrostatic deflectors.

Abstract translation: 用于检测低光信号的电子轰击检测器包括限定圆柱形真空管室的真空管结构，设置在真空管室的第一端的光电阴极，设置在真空管室的第二端的传感器，环形电极 设置在真空管室中，用于产生将发射的光电子朝向传感器加速的电场;以及磁场发生器，被配置为产生对光电子产生聚焦透镜效应的对称磁场。 环形电极和磁场发生器使用减小的距离聚焦方法和加速/减速方法之一进行操作，使得光电子具有低于2keV的着陆能量。 使用反射模式光电阴极可以使用多极偏转线圈或由分段圆形电极结构形成的环形电极。 使用磁性或静电偏转器实现大角度偏转。

公开(公告)号：US09116109B2

公开(公告)日：2015-08-25

申请号：US14230987

申请日：2014-03-31

Applicant: KLA-Tencor Corporation

Inventor： Hong Xiao ,  Ximan Jiang

IPC: G01N23/00 ,  G01N23/225 ,  H01J37/28 ,  H01J37/26

CPC classification number: G01N23/2251 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/24475 ,  H01J2237/2804 ,  H01J2237/2817

Abstract: One embodiment relates to a method of detecting a buried defect in a target microscopic metal feature. An imaging apparatus is configured to impinge charged particles with a landing energy such that the charged particles, on average, reach a depth within the target microscopic metal feature. In addition, the imaging apparatus is configured to filter out secondary electrons and detect backscattered electrons. The imaging apparatus is then operated to collect the backscattered electrons emitted from the target microscopic metal feature due to impingement of the charged particles. A backscattered electron (BSE) image of the target microscopic metal feature is compared with the BSE image of a reference microscopic metal feature to detect and classify the buried defect. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及一种检测目标微观金属特征中的埋入缺陷的方法。 成像装置被配置为以带有电荷的颗粒撞击着陆能量，使得带电粒子平均达到目标微观金属特征内的深度。 此外，成像装置被配置为滤除二次电子并检测反向散射电子。 然后操作成像装置以收集由于带电粒子的撞击而从目标微观金属特征发射的背散射电子。 将目标微观金属特征的背散射电子（BSE）图像与参考微观金属特征的BSE图像进行比较，以检测和分类埋藏缺陷。 还公开了其它实施例，方面和特征。

公开(公告)号：US20140063502A1

公开(公告)日：2014-03-06

申请号：US13957890

申请日：2013-08-02

Applicant: KLA-Tencor Corporation

Inventor： Ximan Jiang ,  Qing Li ,  Stephen Biellak

IPC: H01J40/16

CPC classification number: H01J40/16 ,  H01J31/50

Abstract: The disclosure is directed to image intensifier tube designs for field curvature aberration correction and ion damage reduction. In some embodiments, electrodes defining an acceleration path from a photocathode to a scintillating screen are configured to provide higher acceleration for off-axis electrons along at least a portion of the acceleration path. Off-axis electrons and on-axis electrons are accordingly focused on the scintillating screen with substantial uniformity to prevent or reduce field curvature aberration. In some embodiments, the electrodes are configured to generate a repulsive electric field near the scintillating screen to prevent secondary electrons emitted or deflected by the scintillating screen from flowing towards the photocathode and forming damaging ions.

Abstract translation: 本发明涉及用于场曲率像差校正和离子损伤降低的图像增强管设计。 在一些实施例中，限定从光电阴极到闪烁屏幕的加速路径的电极被配置为沿着加速路径的至少一部分为离轴电子提供更高的加速度。 因此，离轴电子和轴上电子聚焦在闪烁屏上，具有大致均匀性以防止或减小场曲率像差。 在一些实施例中，电极被配置为在闪烁屏幕附近产生排斥电场，以防止由闪烁屏幕发射或偏转的二次电子朝向光电阴极流动并形成有害离子。