公开(公告)号：US20170344695A1

公开(公告)日：2017-11-30

申请号：US15285111

申请日：2016-10-04

Applicant: KLA-Tencor Corporation

Inventor： Prasanti Uppaluri ,  Thirupurasundari Jayaraman ,  Ardis Liang ,  Srikanth Kandukuri ,  Sagar Kekare

IPC: G06F17/50

CPC classification number: G03F7/7065 ,  G03F7/70658 ,  G06F17/5081 ,  G06F2217/12

Abstract: A method for automatically classifying one or more defects based on electrical design properties includes receiving one or more images of a selected region of a sample, receiving one or more sets of design data associated with the selected region of the sample, locating one or more defects in the one or more images of the selected region of the sample by comparing the one or more images of the selected region of the sample to the one or more sets of design data, retrieving one or more patterns of interest from the one or more sets of design data corresponding to the one or more defects, and classifying the one or more defects in the one or more images of the selected region of the sample based on one or more annotated electrical design properties included in the one or more patterns of interest.

公开(公告)号：US10209628B2

公开(公告)日：2019-02-19

申请号：US15285111

申请日：2016-10-04

Applicant: KLA-Tencor Corporation

Inventor： Prasanti Uppaluri ,  Thirupurasundari Jayaraman ,  Ardis Liang ,  Srikanth Kandukuri ,  Sagar Kekare

IPC: G06F17/50 ,  G03F7/20

Abstract: A method for automatically classifying one or more defects based on electrical design properties includes receiving one or more images of a selected region of a sample, receiving one or more sets of design data associated with the selected region of the sample, locating one or more defects in the one or more images of the selected region of the sample by comparing the one or more images of the selected region of the sample to the one or more sets of design data, retrieving one or more patterns of interest from the one or more sets of design data corresponding to the one or more defects, and classifying the one or more defects in the one or more images of the selected region of the sample based on one or more annotated electrical design properties included in the one or more patterns of interest.

公开(公告)号：US10387601B2

公开(公告)日：2019-08-20

申请号：US15358888

申请日：2016-11-22

Applicant: KLA-Tencor Corporation

Inventor： Thirupurasundari Jayaraman ,  Srikanth Kandukuri ,  Gordon Rouse ,  Anil Raman ,  Kenong Wu ,  Praveen Gunasekaran ,  Aravindh Balaji ,  Ankit Jain

IPC: G06F17/50

Abstract: Systems and methods are disclosed for storing dynamic layer content in a design file. A design file is received having design data corresponding to a plurality of process layers. A geometric operation formula is also received. A processor generates a polygon having dynamic layer content that is formed by applying the geometric operation formula on two or more of the plurality of process layers. The updated design file is stored, the design file now having a polygon having dynamic layer content.

公开(公告)号：US09996942B2

公开(公告)日：2018-06-12

申请号：US15073617

申请日：2016-03-17

Applicant: KLA-Tencor Corporation

Inventor： Santosh Bhattacharyya ,  Pavan Kumar ,  Lisheng Gao ,  Thirupurasundari Jayaraman ,  Raghav Babulnath ,  Srikanth Kandukuri ,  Gangadharan Sivaraman ,  Karthikeyan Subramanian ,  Raghavan Konuru ,  Rahul Lakhawat

IPC: G06K9/00 ,  G06T7/33

CPC classification number: G06T7/33 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: Methods and systems for determining a position of output generated by an inspection subsystem in design data space are provided. In general, some embodiments described herein are configured for substantially accurately aligning inspection subsystem output generated for a specimen to a design for the specimen despite deformation of the design in the inspection subsystem output. In addition, some embodiments are configured for generating and/or using alignment targets that can be shared across multiple specimens of the same layer and design rule for alignment of inspection subsystem output generated for a specimen to a design for the specimen.

公开(公告)号：US20170154147A1

公开(公告)日：2017-06-01

申请号：US15358888

申请日：2016-11-22

Applicant: KLA-Tencor Corporation

Inventor： Thirupurasundari Jayaraman ,  Srikanth Kandukuri ,  Gordon Rouse ,  Anil Raman ,  Kenong Wu ,  Praveen Gunasekaran ,  Aravindh Balaji

IPC: G06F17/50

CPC classification number: G06F17/5072 ,  G06F17/5068 ,  G06F17/5081

Abstract: Systems and methods are disclosed for storing dynamic layer content in a design file. A design file is received having design data corresponding to a plurality of process layers. A geometric operation formula is also received. A processor generates a polygon having dynamic layer content that is formed by applying the geometric operation formula on two or more of the plurality of process layers. The updated design file is stored, the design file now having a polygon having dynamic layer content.

公开(公告)号：US20160275672A1

公开(公告)日：2016-09-22

申请号：US15073617

申请日：2016-03-17

Applicant: KLA-Tencor Corporation

Inventor： Santosh Bhattacharyya ,  Pavan Kumar ,  Lisheng Gao ,  Thirupurasundari Jayaraman ,  Raghav Babulnath ,  Srikanth Kandukuri ,  Gangadharan Sivaraman ,  Karthikeyan Subramanian ,  Raghavan Konuru ,  Rahul Lakhawat

IPC: G06T7/00

CPC classification number: G06T7/33 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: Methods and systems for determining a position of output generated by an inspection subsystem in design data space are provided. In general, some embodiments described herein are configured for substantially accurately aligning inspection subsystem output generated for a specimen to a design for the specimen despite deformation of the design in the inspection subsystem output. In addition, some embodiments are configured for generating and/or using alignment targets that can be shared across multiple specimens of the same layer and design rule for alignment of inspection subsystem output generated for a specimen to a design for the specimen.

Abstract translation: 提供了用于确定由检查子系统在设计数据空间中产生的输出位置的方法和系统。 通常，这里描述的一些实施例被配置成用于将检测子系统产生的样品基本上精确地对准于试样的设计，尽管检查子系统输出中的设计变形。 此外，一些实施例被配置用于生成和/或使用可以在同一层的多个样本上共享的对准目标和用于将为样本生成的检查子系统输出对准样本的设计规则的设计规则。