公开(公告)号：US10387601B2

公开(公告)日：2019-08-20

申请号：US15358888

申请日：2016-11-22

Applicant: KLA-Tencor Corporation

Inventor： Thirupurasundari Jayaraman ,  Srikanth Kandukuri ,  Gordon Rouse ,  Anil Raman ,  Kenong Wu ,  Praveen Gunasekaran ,  Aravindh Balaji ,  Ankit Jain

IPC: G06F17/50

Abstract: Systems and methods are disclosed for storing dynamic layer content in a design file. A design file is received having design data corresponding to a plurality of process layers. A geometric operation formula is also received. A processor generates a polygon having dynamic layer content that is formed by applying the geometric operation formula on two or more of the plurality of process layers. The updated design file is stored, the design file now having a polygon having dynamic layer content.

公开(公告)号：US20170154147A1

公开(公告)日：2017-06-01

申请号：US15358888

申请日：2016-11-22

Applicant: KLA-Tencor Corporation

Inventor： Thirupurasundari Jayaraman ,  Srikanth Kandukuri ,  Gordon Rouse ,  Anil Raman ,  Kenong Wu ,  Praveen Gunasekaran ,  Aravindh Balaji

IPC: G06F17/50

CPC classification number: G06F17/5072 ,  G06F17/5068 ,  G06F17/5081

Abstract: Systems and methods are disclosed for storing dynamic layer content in a design file. A design file is received having design data corresponding to a plurality of process layers. A geometric operation formula is also received. A processor generates a polygon having dynamic layer content that is formed by applying the geometric operation formula on two or more of the plurality of process layers. The updated design file is stored, the design file now having a polygon having dynamic layer content.