公开(公告)号：US20200279713A1

公开(公告)日：2020-09-03

申请号：US16106272

申请日：2018-08-21

Applicant: KLA-TENCOR CORPORATION

Inventor： Gildardo R. Delgado ,  Katerina Ioakeimidi ,  Rudy Garcia ,  Zefram Marks ,  Gary V. Lopez Lopez ,  Frances A. Hill ,  Michael E. Romero

IPC: H01J37/073 ,  H01J37/22 ,  G01N23/20058

Abstract: The system includes a photocathode electron source, diffractive optical element, and a microlens array to focus the beamlets. A source directs a radiation beam to the diffractive optical element, which produces a beamlet array to be used in combination with a photocathode surface to generate an array of electron beams from the beamlets.

公开(公告)号：US10741354B1

公开(公告)日：2020-08-11

申请号：US16106272

申请日：2018-08-21

Applicant: KLA-TENCOR CORPORATION

Inventor： Gildardo R. Delgado ,  Katerina Ioakeimidi ,  Rudy Garcia ,  Zefram Marks ,  Gary V. Lopez Lopez ,  Frances A. Hill ,  Michael E. Romero

IPC: H01J37/00 ,  H01J37/073 ,  H01J37/22 ,  G01N23/20058 ,  G02B5/18 ,  G02B3/00 ,  H01J37/28

Abstract: The system includes a photocathode electron source, diffractive optical element, and a microlens array to focus the beamlets. A source directs a radiation beam to the diffractive optical element, which produces a beamlet array to be used in combination with a photocathode surface to generate an array of electron beams from the beamlets.

公开(公告)号：US20190295804A1

公开(公告)日：2019-09-26

申请号：US16249069

申请日：2019-01-16

Applicant: KLA-Tencor Corporation

Inventor： Gildardo Delgado ,  Katerina Ioakeimidi ,  Frances A. Hill ,  Rudy F. Garcia ,  Mike Romero ,  Zefram Marks ,  Gary V. Lopez

IPC: H01J37/073 ,  H01J37/285 ,  H01J37/29 ,  H01J37/244

Abstract: A high-brightness electron beam source is disclosed. The electron beam source may include a broadband illumination source configured to generate broadband illumination. A tunable spectral filter may be configured to filter the broadband illumination to provide filtered illumination having an excitation spectrum. The electron beam source may further include a photocathode configured to emit one or more electron beams in response to the filtered illumination, wherein emission from the photocathode is adjustable based on the excitation spectrum of the filtered illumination from the tunable spectral filter.