公开(公告)号：US11441893B2

公开(公告)日：2022-09-13

申请号：US16018355

申请日：2018-06-26

Applicant: KLA-Tencor Corporation

Inventor： Prasanna Dighe ,  Dieter Mueller ,  Dong Chen ,  Dengpeng Chen ,  Steve Zamek ,  Daniel Kavaldjiev ,  Alexander Buettner

IPC: G01B11/06 ,  G02B6/36

Abstract: A system for analyzing a sample includes an illumination source with a plurality of transmitting optical fibers optically coupled to the illumination source and a detector with a plurality of receiving optical fibers optically coupled to the detector. The system further includes a plurality of probes coupled to respective ones of the plurality of transmitting optical fibers and respective ones of the plurality of receiving optical fibers. The plurality of probes are configured to illuminate respective portions of a surface of the sample and configured to receive illumination reflected, refracted, or radiated from the respective portions of the surface of the sample. The system may further include one or more switches and/or splitters configured to optically couple respective ones of the plurality of transmitting optical fibers to the illumination source and/or configured to optically couple respective ones of the plurality of receiving optical fibers to the detector.

公开(公告)号：US20190331592A1

公开(公告)日：2019-10-31

申请号：US16018355

申请日：2018-06-26

Applicant: KLA-Tencor Corporation

Inventor： Prasanna Dighe ,  Dieter Mueller ,  Dong Chen ,  Dengpeng Chen ,  Steve Zamek ,  Daniel Kavaldjiev ,  Alexander Buettner

IPC: G01N21/27 ,  G01N21/21 ,  G01N21/95 ,  G03F7/20

Abstract: A system for analyzing a sample includes an illumination source with a plurality of transmitting optical fibers optically coupled to the illumination source and a detector with a plurality of receiving optical fibers optically coupled to the detector. The system further includes a plurality of probes coupled to respective ones of the plurality of transmitting optical fibers and respective ones of the plurality of receiving optical fibers. The plurality of probes are configured to illuminate respective portions of a surface of the sample and configured to receive illumination reflected, refracted, or radiated from the respective portions of the surface of the sample. The system may further include one or more switches and/or splitters configured to optically couple respective ones of the plurality of transmitting optical fibers to the illumination source and/or configured to optically couple respective ones of the plurality of receiving optical fibers to the detector.