公开(公告)号：US10438769B1

公开(公告)日：2019-10-08

申请号：US15969555

申请日：2018-05-02

Applicant: KLA-Tencor Corporation

Inventor： Alex Lipkind ,  Alon Rosenthal ,  Frank Chilese ,  John Gerling ,  Lawrence Muray ,  Robert Haynes

IPC: H01J37/28 ,  G21K5/04 ,  H01J37/147 ,  H01J37/153 ,  H01J37/244

Abstract: A scanning electron microscopy (SEM) system includes a plurality of electron beam sources configured to generate a primary electron beam. The SEM system includes an electron-optical column array with a plurality of electron-optical columns. An electron-optical column includes a plurality of electron-optical elements. The plurality of electron-optical elements includes a deflector layer configured to be driven via a common controller shared by at least some of the plurality of electron-optical columns and includes a trim deflector layer configured to be driven by an individual controller. The plurality of electron-optical elements is arranged to form an electron beam channel configured to direct the primary electron beam to a sample secured on a stage, which emits an electron beam in response to the primary electron beam. The electron-optical column includes an electron detector. The electron beam channel is configured to direct the electron beam to the electron detector.