公开(公告)号：US20130228699A1

公开(公告)日：2013-09-05

申请号：US13781913

申请日：2013-03-01

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Akiko KAKUTANI ,  Kiyoshi HASHIMOTO ,  Kiyokazu SATO ,  Akihiro OSANAI ,  Takeshi YOSHIYUKI ,  Tsutomu KURUSU

IPC: H01J27/24

CPC classification number: H01J27/24 ,  A61N2005/1085 ,  H01J27/024 ,  H01J37/08

Abstract: According to one embodiment, there is provided an ion source. The ion source includes a vacuum-exhausted vacuum chamber, a target which is set in the vacuum chamber and generates a plurality of valences of ions by irradiation of a laser beam, an acceleration electrode which is applied with voltage in order to accelerate the ions generated by the target, and an intermediate electrode which is provided between the target and the acceleration electrode and is applied with reverse voltage of the voltage applied to the acceleration electrode.

Abstract translation: 根据一个实施例，提供了一种离子源。 离子源包括真空耗尽的真空室，设置在真空室中的靶，并通过激光束的照射产生多个离子价，施加电压的加速电极，以加速产生的离子 以及设置在目标和加速电极之间的中间电极，并施加施加到加速电极的电压的反向电压。

公开(公告)号：US20130228698A1

公开(公告)日：2013-09-05

申请号：US13777071

申请日：2013-02-26

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Akiko KAKUTANI ,  Kiyoshi HASHIMOTO ,  Kiyokazu SATO ,  Akihiro OSANAI ,  Takeshi YOSHIYUKI ,  Tsutomu KURUSU ,  Kazuo HAYASHI

IPC: H01J27/24

CPC classification number: H01J27/24

Abstract: According to one embodiments, an ion source connected with a vacuum-exhausted downstream apparatus is provided. The ion source includes a vacuum chamber which is vacuum-exhausted, a target which is set in the vacuum chamber and generates ions by irradiation of a laser beam, a transportation unit which transports the ions generated by the target to the downstream apparatus, and a vacuum sealing unit which seals the transportation unit so as to separate vacuum-conditions of the vacuum chamber side and the downstream apparatus side before exchanging the target set in the vacuum chamber.

Abstract translation: 根据一个实施例，提供了与真空排出的下游装置连接的离子源。 离子源包括被真空排出的真空室，被设置在真空室中并通过照射激光束产生离子的靶，将由靶产生的离子输送到下游装置的输送单元，以及 真空密封单元，其在更换真空室内的目标组之前密封输送单元以分离真空室侧和下游装置侧的真空条件。

公开(公告)号：US20130234036A1

公开(公告)日：2013-09-12

申请号：US13771818

申请日：2013-02-20

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Akiko KAKUTANI ,  Kiyoshi HASHIMOTO ,  Kiyokazu SATO ,  Takeshi YOSHIYUKI ,  Tsutomu KURUSU

IPC: H01J27/24 ,  H01J37/30

CPC classification number: H01J37/3299 ,  A61N5/1067 ,  A61N2005/1088 ,  H01J27/24 ,  H01J37/30 ,  H01J37/32935 ,  H01J37/32972 ,  H01J49/161 ,  H01J2237/0815 ,  H05H1/46

Abstract: A laser-ablation plasma generator generates laser-ablation plasma from a target in a vacuum vessel. An ion beam extractor generates an ion beam by extracting ions included in the laser-ablation plasma from the vacuum vessel. An ion detector detects unintended ions other than intended ions, which are obtained by ionizing the elements in the target, out of ions in the vacuum vessel and outputs a detection signal representing a value which is a number of the unintended ions or a mixing ratio of the unintended ions to the intended ions as a detection result. The ion source using the laser beam makes it possible to normally monitor unintended ions other than intended ions out of ions in the vacuum vessel.

Abstract translation: 激光消融等离子体发生器从真空容器中的靶产生激光消融等离子体。 离子束提取器通过从真空容器中提取激光消融等离子体中包含的离子来产生离子束。 离子检测器检测除了目标离子之外的非预期离子，其通过将靶中的元素离子化而离开真空容器中的离子，并输出表示作为非预期离子数的值的检测信号或混合比 作为检测结果，预期离子的非预期离子。 使用激光束的离子源使得可以在真空容器内正常地监测除预期离子之外的非预期离子。