Abstract:
An optical non-destructive inspection method includes: heating including setting a measurement spot on a surface of a workpiece and irradiating the measurement spot with heating laser light using a heating laser light source, heat ray detectors, and a controller; acquiring a temperature rise property that is a temperature rise state of the measurement spot according to a heating time by detecting a heat ray radiated from the measurement spot to determine a temperature at the measurement spot; and determining whether or not a pressure contact state at pressure contact portions, which include a contact area and a contact pressure, is appropriate based on the temperature rise property.
Abstract:
There are provided an optical non-destructive inspection apparatus that can inspect a measurement object such as a wire bonding portion. The apparatus includes a focusing-collimating unit, a heating laser beam source, a heating laser beam guide unit, a first infrared detector, a second infrared detector, an emitted-infrared selective guide unit, and a control unit. The control unit controls the heating laser beam source, measures a temperature rise characteristic that is a temperature rise state of a measurement spot based on a heating time, on the basis of a ratio between a detected value from the first infrared detector and a detected value from the second infrared detector, determines a state of a measurement object based on the temperature rise characteristic, and changes at least one of wavelengths of infrared light beams guided to the first infrared detector and the second infrared detector based on a measured temperature during measurement.
Abstract:
An optical nondestructive testing method includes: a laser emitting step involving emitting a heating laser from a laser output device such that the intensity of the heating laser applied to a measurement point changes sinusoidally; a laser intensity measuring step involving measuring the intensity of the heating laser by a phase difference detector; an infrared radiation intensity measuring step involving measuring, by the phase difference detector, the intensity of infrared radiation radiating from the measurement point; a phase difference measuring step involving determining, by the phase difference detector, a phase difference between the intensity of the heating laser and the intensity of the infrared radiation, and outputting the phase difference determined to a determiner from the phase difference detector; and a connection area calculating step involving determining, by the determiner, a connection area in accordance with the phase difference and phase difference-connection area correlation information.
Abstract:
There are provided an optical non-destructive inspection apparatus and an optical non-destructive inspection method. The apparatus includes a focusing-collimating unit, a heating laser beam source, a heating laser beam guide unit, an infrared detector, an emitted-infrared guide unit, first and second correcting laser beam source, first and second correcting laser beam guide units, first and second correcting laser detectors, first and second reflected laser beam guide units, and a control unit. The control unit controls the heating laser beam source and the first and second correcting laser beam sources, measures a temperature rise characteristic that is a temperature rise state of a measurement spot based on a heating time, on the basis of a detection signal from the infrared detector and detection signals from the first and second correcting laser detectors, and determines a state of a measurement object based on the measured temperature rise characteristic.
Abstract:
There are provided an optical non-destructive inspection apparatus and an optical non-destructive inspection method. The apparatus includes a focusing-collimating unit, a heating laser beam source, a heating laser beam guide unit, an infrared detector, an emitted-infrared guide unit, first and second correcting laser beam source, first and second correcting laser beam guide units, first and second correcting laser detectors, first and second reflected laser beam guide units, and a control unit. The control unit controls the heating laser beam source and the first and second correcting laser beam sources, measures a temperature rise characteristic that is a temperature rise state of a measurement spot based on a heating time, on the basis of a detection signal from the infrared detector and detection signals from the first and second correcting laser detectors, and determines a state of a measurement object based on the measured temperature rise characteristic.