公开(公告)号：US20140097341A1

公开(公告)日：2014-04-10

申请号：US13975809

申请日：2013-08-26

申请人： FEI Company

发明人： Lubomír Tuma ,  Petr Hlavenka ,  Petr Sytar ,  Radek Ceska ,  Bohuslav Sed'a

IPC分类号： H01J37/244 ,  H01J37/26

CPC分类号： H01J37/26 ,  H01J37/145 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/04926 ,  H01J2237/2443 ,  H01J2237/24465

摘要： The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged particle sensitive surface, preferably a scintillator disk that acts as one of the electrode faces forming the electrostatic focusing field. The photons generated in the scintillator are detected by a photon detector, such as a photo-diode or a multi-pixel photon detector. The objective lens may be equipped with another electron detector for detecting secondary electrons that are kept closer to the axis. A light guide may be used to offer electrical insulation between the photon detector and the scintillator.

摘要翻译： 本发明涉及一种柱内反向散射电子检测器，该探测器放置在用于SEM的组合静电/磁性物镜中。 检测器形成为带电粒子敏感表面，优选地形成作为形成静电聚焦场的电极面之一的闪烁体盘。 在闪烁体中产生的光子被光子检测器（例如光电二极管或多像素光子检测器）检测。 物镜可以配备有用于检测保持靠近轴线的二次电子的另一电子检测器。 可以使用光导来在光子检测器和闪烁体之间提供电绝缘。

公开(公告)号：US20220199354A1

公开(公告)日：2022-06-23

申请号：US17127749

申请日：2020-12-18

申请人： FEI Company

发明人： Lubomír Tuma

IPC分类号： H01J37/143 ,  H01J37/20 ,  H01J37/21

摘要： A charged particle beam system can include a vacuum chamber, a specimen holder for holding a specimen within the vacuum chamber, and a charged particle column. The charged particle column can include a charged particle source for producing a beam of charged particles along an optical axis and a magnetic immersion lens for focusing the beam of charged particles. The magnetic immersion lens can include a first lens pole disposed adjacent a first surface of the specimen, an excitation coil surrounding the first lens pole, and a counterpole disposed adjacent a second surface of the specimen, the counterpole including one or more magnets disposed on the counterpole.

公开(公告)号：US20180061613A1

公开(公告)日：2018-03-01

申请号：US15683734

申请日：2017-08-22

申请人： FEI Company

发明人： Bohuslav Sed'a ,  Lubomír Tuma ,  Petr Hlavenka ,  Marek Uncovský ,  Radovan Vasina ,  Jan Trojek ,  Mostafa Maazouz

IPC分类号： H01J37/26 ,  H01J37/20 ,  H01J37/244

CPC分类号： H01J37/261 ,  G21K7/00 ,  H01J37/12 ,  H01J37/1413 ,  H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/121 ,  H01J2237/1415 ,  H01J2237/188 ,  H01J2237/2605

摘要： A charged-particle microscope having a vacuum chamber comprises a specimen holder, a particle-optical column, a detector and an exchangeable column extending element. The specimen holder is for holding a specimen. The particle-optical column is for producing and directing a beam of charged particles along an axis so as to irradiate the specimen. The column has a terminal pole piece at an extremity facing the specimen holder. The detector is for detecting a flux of radiation emanating from the specimen in response to irradiation by the beam. The exchangeable column extending element is magnetically mounted on the pole piece in a space between the pole piece and the specimen holder. Methods of using the microscope are also disclosed.