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公开(公告)号:US08946094B2
公开(公告)日:2015-02-03
申请号:US13867535
申请日:2013-04-22
Inventor: Yong Ju Yun , Kibong Song
IPC: H01L21/31 , H01L21/02 , H01L29/16 , H01L29/778 , H01L29/417 , H01L29/06
CPC classification number: H01L29/1606 , H01L21/02422 , H01L21/02527 , H01L21/02601 , H01L21/02628 , H01L21/02639 , H01L21/02664 , H01L29/0673 , H01L29/41758 , H01L29/778
Abstract: A method of fabricating a graphene electronic device includes (a) forming a first electrode and a second electrode spaced apart from each other, on a substrate; (b) forming supporting patterns on the first electrode and the second electrode; (c) coating the supporting patterns with graphene-oxide-containing solution to form composite patterns; and (d) separating the supporting patterns from the composite patterns. The step of forming supporting patterns may expose end portions of the first and second electrodes and the substrate between the end portions and be accomplished by providing a mask on the first and second electrodes; and electrospinning a polymer solution on the first and second electrodes with the mask. The supporting patterns may be composed of polymer fibers.
Abstract translation: 一种制造石墨烯电子器件的方法包括:(a)在衬底上形成彼此间隔开的第一电极和第二电极; (b)在第一电极和第二电极上形成支撑图案; (c)用含氧化烯烃的溶液涂覆支撑图案以形成复合图案; 和(d)从复合图案分离支撑图案。 形成支撑图案的步骤可以使第一和第二电极和基板的端部暴露在端部之间,并且通过在第一和第二电极上设置掩模来实现; 以及用所述掩模将所述聚合物溶液静电纺丝在所述第一和第二电极上。 支撑图案可以由聚合物纤维组成。
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公开(公告)号:US09257510B2
公开(公告)日:2016-02-09
申请号:US14566660
申请日:2014-12-10
Inventor: Yong Ju Yun , Kibong Song
IPC: H01L31/112 , H01L29/16 , H01L21/02 , H01L29/778 , H01L29/417 , H01L29/06
CPC classification number: H01L29/1606 , H01L21/02422 , H01L21/02527 , H01L21/02601 , H01L21/02628 , H01L21/02639 , H01L21/02664 , H01L29/0673 , H01L29/41758 , H01L29/778
Abstract: A graphene electronic device includes a substrate, a first electrode and a second electrode provided on the substrate and spaced apart from each other, and graphene channels connecting the first electrode with the second electrode. Each of the graphene channels is separated from the substrate to have a cylindrical structure.
Abstract translation: 石墨烯电子器件包括衬底,第一电极和设置在衬底上并彼此间隔开的第二电极,以及连接第一电极和第二电极的石墨烯通道。 每个石墨烯通道与基板分离成具有圆柱形结构。
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公开(公告)号:US20130313523A1
公开(公告)日:2013-11-28
申请号:US13867535
申请日:2013-04-22
Inventor: Yong Ju Yun , Kibong Song
CPC classification number: H01L29/1606 , H01L21/02422 , H01L21/02527 , H01L21/02601 , H01L21/02628 , H01L21/02639 , H01L21/02664 , H01L29/0673 , H01L29/41758 , H01L29/778
Abstract: Provided are a method of fabricating a graphene electronic device and the graphene electronic device fabricated thereby. The method may include forming a first electrode and a second electrode spaced apart from each other, on a substrate, forming supporting patterns on the first electrode and the second electrode, coating the supporting patterns with graphene-oxide-containing solution to form composite patterns, and separating the supporting patterns from the composite patterns.
Abstract translation: 提供一种制造石墨烯电子器件的方法和由此制造的石墨烯电子器件。 该方法可以包括在基板上形成彼此间隔开的第一电极和第二电极,在第一电极和第二电极上形成支撑图案,用含有氧化烯烃的溶液涂覆支撑图案以形成复合图案, 并将支撑图案与复合图案分开。
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