公开(公告)号：US20200381271A1

公开(公告)日：2020-12-03

申请号：US16560326

申请日：2019-09-04

Applicant: APPLIED Materials, Inc.

Inventor： Dawei Sun ,  Dale K. Stone ,  D. Jeffrey Lischer ,  Lyudmila Stone ,  Steven Anella ,  Julian G. Blake ,  Ron Serisky ,  Daniel A. Hall ,  Robert H. Bettencourt

IPC: H01L21/67 ,  H05B1/02

Abstract: A heating system for heating a substrate. The heating system may include a susceptor, where the susceptor has a substrate support surface. The heating system may further include a heat transfer layer, disposed on the substrate support surface, where the heat transfer layer comprising an array of aligned carbon nanotubes.

公开(公告)号：US20210225682A1

公开(公告)日：2021-07-22

申请号：US16749336

申请日：2020-01-22

Applicant: Applied Materials, Inc.

Inventor： Dawei Sun ,  Steven M. Anella ,  Qin Chen ,  Ron Serisky ,  Julian G. Blake ,  David J. Chipman

IPC: H01L21/683 ,  B23Q3/154

Abstract: A platen having improved thermal conductivity and reduced friction is disclosed. In one embodiment, vertically aligned carbon nanotubes are grown on the top surface of the platen. The carbon nanotubes have excellent thermal conductivity, thus improving the transfer of heat between the platen and the workpiece. Furthermore, the friction between the carbon nanotubes and the workpiece is much lower than that with conventional embossments, reducing particle generation. In another embodiment, a support plate is disposed on the platen, wherein the carbon nanotubes are disposed on the top surface of the support plate.

公开(公告)号：US20200378837A1

公开(公告)日：2020-12-03

申请号：US16560566

申请日：2019-09-04

Applicant: APPLIED Materials, Inc.

Inventor： Dawei Sun ,  D. Jeffrey Lischer ,  Qin Chen ,  Dale K. Stone ,  Lyudmila Stone ,  Steven Anella ,  Ron Serisky ,  Chi-Yang Cheng

IPC: G01K1/16 ,  G01K7/02 ,  G01J5/10 ,  G01J5/02

Abstract: A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.

公开(公告)号：US11473978B2

公开(公告)日：2022-10-18

申请号：US16560566

申请日：2019-09-04

Applicant: APPLIED Materials, Inc.

Inventor： Dawei Sun ,  D. Jeffrey Lischer ,  Qin Chen ,  Dale K. Stone ,  Lyudmila Stone ,  Steven Anella ,  Ron Serisky ,  Chi-Yang Cheng

IPC: G01K1/16 ,  G01J5/02 ,  G01J5/10 ,  G01K7/02

Abstract: A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.

公开(公告)号：US11069554B1

公开(公告)日：2021-07-20

申请号：US16749336

申请日：2020-01-22

Applicant: Applied Materials, Inc.

Inventor： Dawei Sun ,  Steven M. Anella ,  Qin Chen ,  Ron Serisky ,  Julian G. Blake ,  David J. Chipman

IPC: H01L21/683 ,  H01T23/00 ,  B23Q3/154

Abstract: A platen having improved thermal conductivity and reduced friction is disclosed. In one embodiment, vertically aligned carbon nanotubes are grown on the top surface of the platen. The carbon nanotubes have excellent thermal conductivity, thus improving the transfer of heat between the platen and the workpiece. Furthermore, the friction between the carbon nanotubes and the workpiece is much lower than that with conventional embossments, reducing particle generation. In another embodiment, a support plate is disposed on the platen, wherein the carbon nanotubes are disposed on the top surface of the support plate.