公开(公告)号：US20230154719A1

公开(公告)日：2023-05-18

申请号：US18155684

申请日：2023-01-17

Applicant: ASML Netherlands B.V.

Inventor： Laura DINU-GURTLER ,  Eric Petrus HOGERVORST ,  Jurgen VAN SOEST

IPC: H01J37/04 ,  G03F7/20 ,  H01J37/10 ,  H01J37/244 ,  H01J37/317 ,  H01L21/263

CPC classification number: H01J37/04 ,  G03F7/70016 ,  H01J37/10 ,  H01J37/244 ,  H01J37/3175 ,  H01L21/263 ,  H01J2237/061

Abstract: The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged particle source arrangement for generating a charged particle beam, such as an electron beam, wherein said charged particle source arrangement, such as an electron source, is arranged at said second frame part; and a power connecting assembly arranged at said first frame part, wherein said charged particle source arrangement is electrically connected to said connecting assembly via electrical wiring.

公开(公告)号：US20200043693A1

公开(公告)日：2020-02-06

申请号：US16600364

申请日：2019-10-11

Applicant: ASML Netherlands B.V.

Inventor： Laura DINU-GURTLER ,  Eric Petrus HOGERVORST ,  Jurgen VAN SOEST

IPC: H01J37/04 ,  H01J37/317 ,  H01J37/10 ,  H01L21/263 ,  H01J37/244 ,  G03F7/20

Abstract: The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged particle source arrangement for generating a charged particle beam, such as an electron beam, wherein said charged particle source arrangement, such as an electron source, is arranged at said second frame part; and a power connecting assembly arranged at said first frame part, wherein said charged particle source arrangement is electrically connected to said connecting assembly via electrical wiring.