公开(公告)号：US20210263418A1

公开(公告)日：2021-08-26

申请号：US17260649

申请日：2019-06-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Bert Dirk SCHOLTEN ,  Peter Andreas Maria BILLEKENS ,  Tiannan GUAN ,  Tjarco LINDEIJER ,  Harold Anton MEHAGNOUL ,  Jimmy Matheus Wilhelmus VAN DE WINKEL ,  Cas Johannes Petrus Maria VAN NUENEN ,  Hendrikus Theodorus Jacobus Franciscus VAN VERSEVELD ,  Marcus Martinus Petrus Adrianus VERMEULEN

IPC: G03F7/20 ,  B24B37/14 ,  B24B37/16

Abstract: A tool for modifying substrate support elements of a substrate holder, the substrate support elements having support surfaces for supporting a substrate, the tool includes a main body having a main body surface, and multiple protrusions from the main body surface, the multiple protrusions having distal ends configured to contact the support surfaces to modify the substrate support elements. Furthermore, a lithographic apparatus and a method comprising such a tool are provided.