公开(公告)号：US11495932B2

公开(公告)日：2022-11-08

申请号：US16001243

申请日：2018-06-06

Applicant: APPLIED MATERIALS, INC.

Inventor： Muhannad Mustafa ,  Yu Chang ,  William Kuang ,  Muhammad M. Rasheed ,  Xiping Huo

IPC: H01L21/687 ,  H01R39/12 ,  H01R39/18 ,  H02K13/00 ,  H01L21/67

Abstract: Embodiments of a slip ring for use in a rotatable substrate support are provided herein. In some embodiments a slip ring includes a main body having a top wall, a bottom wall, and a sidewall extending between the top and bottom walls, wherein the top wall, bottom wall, and sidewall define an inner volume within the main body, wherein a central opening is formed through the top wall; a plurality of annular containers disposed within the inner volume and coaxially with the main body, wherein the plurality of annular containers are vertically spaced apart from one another, and wherein each of the plurality of annular containers contains a first volume of an electrically conductive liquid; an upper cylindrical body rotatably disposed in the central opening; a lower cylindrical body fixedly coupled to the lower wall of the main body.

公开(公告)号：US20180358768A1

公开(公告)日：2018-12-13

申请号：US16001243

申请日：2018-06-06

Applicant: Applied Materials, Inc.

Inventor： Muhannad Mustafa ,  Yu Chang ,  William Kuang ,  Muhammad M. Rasheed ,  Xiping Huo

IPC: H01R39/12 ,  H02K13/00 ,  H01R39/18

CPC classification number: H01R39/12 ,  H01L21/68764 ,  H01R39/18 ,  H02K13/003

Abstract: Embodiments of a slip ring for use in a rotatable substrate support are provided herein. In some embodiments a slip ring includes a main body having a top wall, a bottom wall, and a sidewall extending between the top and bottom walls, wherein the top wall, bottom wall, and sidewall define an inner volume within the main body, wherein a central opening is formed through the top wall; a plurality of annular containers disposed within the inner volume and coaxially with the main body, wherein the plurality of annular containers are vertically spaced apart from one another, and wherein each of the plurality of annular containers contains a first volume of an electrically conductive liquid; an upper cylindrical body rotatably disposed in the central opening; a lower cylindrical body fixedly coupled to the lower wall of the main body.