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    Micro electro mechanical device having an opening between a fixing portion and a torsion bar
    2.
    发明授权
    Micro electro mechanical device having an opening between a fixing portion and a torsion bar 有权
    具有在固定部分和扭杆之间的开口的微机电装置

    公开(公告)号：US08179582B2

    公开(公告)日：2012-05-15

    申请号：US12382133

    申请日：2009-03-09

    申请人： Yasuhiro Omori ,  Osamu Tsuboi ,  Hiromitsu Soneda

    发明人： Yasuhiro Omori ,  Osamu Tsuboi ,  Hiromitsu Soneda

    IPC分类号： G02B26/08

    CPC分类号： G02B26/0841 ,  G02B26/101

    摘要： A micro electro mechanical device includes an inner frame provided with a movable part and an outer frame provided in a circumference of the inner frame. The outer frame has a fixing part fixed by a joining material. A first torsion bar is provided between the outer frame and the inner frame so as to swingably support the inner frame on the outer frame. A first opening is formed in the outer frame in a vicinity of the first torsion bar. The first opening is positioned between the fixing part of the outer frame and the first torsion bar.

    摘要翻译： 微电子机械装置包括设置有可移动部分的内框架和设置在内框架的圆周中的外框架。 外框具有通过接合材料固定的固定部。 第一扭杆设置在外框架和内框架之间，以可摆动地支撑外框架上的内框架。 第一开口形成在第一扭杆附近的外框架中。 第一开口位于外框架的固定部分和第一扭杆之间。

    MICROSTRUCTURE AND MICROSTRUCTURE MANUFACTURE METHOD
    4.
    发明申请
    MICROSTRUCTURE AND MICROSTRUCTURE MANUFACTURE METHOD 有权
    微结构和微结构制造方法

    公开(公告)号：US20110192635A1

    公开(公告)日：2011-08-11

    申请号：US13091728

    申请日：2011-04-21

    申请人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

    发明人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

    IPC分类号： H05K1/00 ,  H01B13/06

    CPC分类号： B81C1/00698 ,  Y10T29/49117

    摘要： A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.

    摘要翻译： 微结构包括具有第一导体，第二导​​体和位于第一和第二导体之间的中间绝缘体的层压结构。 第一导体包括相对于第二导体的相对面，侧面和形成上述相对面和侧面的边界的边缘部分。 第二导体包括延伸超过超过第一导体的边缘部分的延伸面。 绝缘膜包括覆盖边缘部分的至少一部分和/或侧面的至少一部分的区域。

    Micro oscillating element
    5.
    发明申请
    Micro oscillating element 有权
    微振荡元件

    公开(公告)号：US20100231087A1

    公开(公告)日：2010-09-16

    申请号：US12659975

    申请日：2010-03-26

    申请人： Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Ippei Sawaki

    发明人： Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Ippei Sawaki

    IPC分类号： H02N11/00

    CPC分类号： H02N1/008 ,  G02B26/0841

    摘要： A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth, electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.

    摘要翻译： 微振荡元件包括框架和经由扭转接合部分连接到框架的振荡部分。 振荡部包括可动功能部，臂部和第一梳齿电极。 臂部分从功能部分延伸。 第一梳齿电极包括从臂部沿与臂部相交的方向延伸的第一电极齿。 微振荡元件还包括第二梳齿电极，与第一梳齿电极配合，用于使振动部分围绕由扭转接合部分限定的摆动轴线摆动。 第二梳齿电极包括从框架沿与臂部相交的方向延伸的第二电极齿。

    MICRO MOVABLE DEVICE AND OPTICAL SWITCHING APPARATUS
    6.
    发明申请
    MICRO MOVABLE DEVICE AND OPTICAL SWITCHING APPARATUS 有权
    微型可移动设备和光学切换设备

    公开(公告)号：US20100092130A1

    公开(公告)日：2010-04-15

    申请号：US12573393

    申请日：2009-10-05

    申请人： Hiromitsu SONEDA ,  Tsuyoshi Matsumoto ,  Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Osamu Tsuboi

    发明人： Hiromitsu SONEDA ,  Tsuyoshi Matsumoto ,  Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Osamu Tsuboi

    IPC分类号： G02B6/26 ,  H02N1/00 ,  G02B26/08

    CPC分类号： G02B26/0841 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  B81C3/001 ,  G01D5/285 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  H02N1/006

    摘要： A micro movable device includes: a micro movable substrate in which a micro movable unit is formed, the micro movable unit including a frame, a movable part, and a coupling part for coupling the frame and the movable part to define an axial center of rotation of the movable part; a supporting substrate; and a reinforced fixed part provided between the frame and the supporting substrate, and including a first spacer that joins the frame to the supporting substrate and an adhesive part that covers the first spacer and joins the frame to the supporting substrate, wherein the frame includes a first area facing the movable part in a direction of extent of the axial center, and a second area different from the first area, and the reinforced fixed part is bonded to the second area of the frame.

    摘要翻译： 微型移动装置包括：微型可移动基板，其中形成有微型可动单元，微型可移动单元包括框架，可移动部件和用于联接框架和可动部件的联接部件，以限定轴向旋转中心 的可动部分; 支撑基板; 以及设置在所述框架和所述支撑基板之间的加强固定部，并且包括将所述框架连接到所述支撑基板的第一间隔件和覆盖所述第一间隔件并将所述框架连接到所述支撑基板的粘合部，其中，所述框架包括 所述第一区域与所述第一区域不同的第二区域，所述加强固定部分接合到所述框架的第二区域。

    Micro-oscillating element and method of making the same
    7.
    发明申请
    Micro-oscillating element and method of making the same 有权
    微振动元件及其制造方法

    公开(公告)号：US20090107949A1

    公开(公告)日：2009-04-30

    申请号：US12292540

    申请日：2008-11-20

    申请人： Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

    发明人： Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

    IPC分类号： B44C1/22

    CPC分类号： G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/058

    摘要： A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.

    摘要翻译： 微振动元件包括框架，可移动功能部分和用于连接框架和功能部分的扭转接头。 微振动元件还包括用于产生用于可动功能部分围绕扭转接头的摆动运动的驱动力的第一和第二梳齿电极。 第一梳齿电极包括多个第一电极齿，每个第一电极齿具有沿振荡运动方向层叠的第一导体，绝缘体和第二导体，其中第一导体和第二导体彼此电连接。 第二梳齿电极包括在不操作期间不面向第二导体而是面对第一电极齿的第一导体的多个第二电极齿。 第二电极齿在摆动运动方向上比第一导体长。

    Micro-oscillation element having two rotational axes that are non-orthogonal to each other
    10.
    发明授权
    Micro-oscillation element having two rotational axes that are non-orthogonal to each other 失效
    微振动元件具有彼此不正交的两个旋转轴

    公开(公告)号：US07161274B2

    公开(公告)日：2007-01-09

    申请号：US10790762

    申请日：2004-03-03

    申请人： Osamu Tsuboi ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

    发明人： Osamu Tsuboi ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

    IPC分类号： H02N1/00 ,  G02B26/08

    CPC分类号： H02N1/008

    摘要： A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.

    摘要翻译： 微振荡元件包括可移动主体部分，第一框架和第二框架，以及第一连接部分，其连接可移动主体部分和第一框架，并且限定第一旋转轴线用于可移动主体的第一旋转操作 相对于第一帧的截面。 元件还包括第二连接部分，其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。 第一驱动机构被提供用于产生用于第一旋转操作的驱动力。 提供第二驱动机构用于产生用于第二旋转操作的驱动力。 第一旋转轴线和第二旋转轴线不正交。