Invention Grant
- Patent Title: Surface correction of mirrors with decoupling coating
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Application No.: US14981018Application Date: 2015-12-28
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Publication No.: US09921483B2Publication Date: 2018-03-20
- Inventor: Oliver Dier , Tobias Hackl , Franz-Josef Stickel , Ulrich Loering , Tilmann Assmus , Juergen Mueller , Vladimir Kamenov , Siegfried Rennon
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102013212462 20130627
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03F7/20 ; G02B5/08 ; G21K1/06 ; H05G2/00 ; G02B27/00

Abstract:
A mirror (1) for EUV lithography includes a substrate (2) and a reflective coating (3, 4). The reflective coating has a first group (3) of layers (3a, 3b) and a second group (4) of layers (4a, 4b), wherein the first group and second group of layers (3a, 3b; 4a, 4b) reflect radiation having a used wavelength between 5 nm and 30 nm. The first group of layers is arranged between the substrate and the second group of layers, and a decoupling coating (6) is arranged between the first group and second group of layers, said decoupling coating optically decoupling the second group of layers from the first group of layers by preventing the radiation having the used wavelength from reaching the first group of layers. The reflective coating preferably has a correction layer (5) having a layer thickness variation for correcting the surface form of the mirror.
Public/Granted literature
- US20160209750A1 SURFACE CORRECTION OF MIRRORS WITH DECOUPLING COATING Public/Granted day:2016-07-21
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