- 专利标题: Method for producing semiconductor device and semiconductor device
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申请号: US15228049申请日: 2016-08-04
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公开(公告)号: US09780215B2公开(公告)日: 2017-10-03
- 发明人: Fujio Masuoka , Hiroki Nakamura
- 申请人: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- 申请人地址: SG Singapore
- 专利权人: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- 当前专利权人: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- 当前专利权人地址: SG Singapore
- 代理机构: Brinks Gilson & Lione
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/02 ; H01L21/306 ; H01L29/40 ; H01L29/423 ; H01L29/49 ; H01L29/66 ; H01L29/06
摘要:
A method for producing a semiconductor device includes a first step of forming a fin-shaped semiconductor layer on a semiconductor substrate and forming a first insulating film; a second step of forming a pillar-shaped semiconductor layer and a first dummy gate; a third step of forming a second dummy gate; a fourth step of forming a fifth insulating film and a sixth insulating film; a fifth step of depositing a first interlayer insulating film, removing the second dummy gate and the first dummy gate, forming a gate insulating film, depositing metal, and performing etch back to form a gate electrode and a gate line; a seventh step of forming a seventh insulating film; and an eighth step of forming insulating film sidewalls, forming a first epitaxially grown layer on the fin-shaped semiconductor layer, and forming a second epitaxially grown layer on the pillar-shaped semiconductor layer.
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