发明授权
US09570454B2 Structure with emedded EFS3 and FinFET device 有权
具有EFS3和FinFET器件的结构

Structure with emedded EFS3 and FinFET device
摘要:
The present disclosure relates to an integrated chip having a FinFET device and an embedded flash memory device, and a method of formation. In some embodiments, the integrated chip has a logic region and a memory region that is laterally separated from the logic region. The logic region has a first plurality of fins of semiconductor material protruding outward from a semiconductor substrate. A gate electrode is arranged over the first plurality of fins of semiconductor material. The memory region has a second plurality of fins of semiconductor material extending outward from the semiconductor substrate. An embedded flash memory cell is arranged onto the second plurality of fins of semiconductor material. The resulting integrated chip structure provides for good performance since it contains both a FinFET device and an embedded flash memory device.
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