Invention Grant
- Patent Title: Arrangement for actuating an element in a microlithographic projection exposure apparatus
- Patent Title (中): 用于在微光刻投影曝光设备中致动元件的布置
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Application No.: US14818507Application Date: 2015-08-05
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Publication No.: US09568837B2Publication Date: 2017-02-14
- Inventor: Sascha Bleidistel , Ulrich Schoenhoff , Juergen Fischer
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102013201082 20130124
- Main IPC: G02B5/08
- IPC: G02B5/08 ; G02B7/182 ; G03B27/32 ; G03B27/54 ; G03F7/20 ; G02B26/08 ; G02B7/00 ; G02B7/185

Abstract:
The invention relates to arrangements for actuating an element in a microlithographic projection exposure apparatus. In accordance with one aspect, an arrangement for actuating an element in a microlithographic projection exposure apparatus comprises a first number (nR) of degrees of freedom, wherein an adjustable force can be transmitted to the optical element in each of the degrees of freedom, and a second number (nA) of actuators, which are coupled to the optical element in each case via a mechanical coupling for the purpose of transmitting force to the optical element, wherein the second number (nA) is greater than the first number (nR). In accordance with one aspect, at least one of the actuators is arranged in a node of at least one natural vibration mode of the optical element.
Public/Granted literature
- US20160054661A1 ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2016-02-25
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