Invention Grant
US09475092B2 Electro-acoustic transducer and method of manufacturing the same 有权
电声换能器及其制造方法

Electro-acoustic transducer and method of manufacturing the same
Abstract:
An electro-acoustic transducer includes: a conductive substrate in which a first trench is formed, and which includes an electrode connection unit surrounded by the first trench; a membrane provided on the conductive substrate; an upper electrode provided on the membrane to contact an upper surface of the electrode connection unit; a first electrode provided on a lower surface of the conductive substrate to contact a lower surface of the electrode connection unit; and a second electrode spaced apart from the first electrode and provided to contact the lower surface of the conductive substrate.
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