发明授权
- 专利标题： Method of manufacturing stacked thin film piezoelectric filter
- 专利标题（中）： 堆叠薄膜压电滤波器的制造方法
-
申请号： US14492210申请日： 2014-09-22
-
公开(公告)号： US09386388B2公开(公告)日： 2016-07-05
- 发明人: Takashi Miyake
- 申请人： Murata Manufacturing Co., Ltd.
- 申请人地址： JP Kyoto
- 专利权人： Murata Manufacturing Co., Ltd.
- 当前专利权人： Murata Manufacturing Co., Ltd.
- 当前专利权人地址： JP Kyoto
- 代理机构： Keating & Bennett, LLP
- 优先权： JP2009-278576 20091208; JP2010-236297 20101021
- 主分类号： H01R31/00
- IPC分类号： H01R31/00 ; H03H3/02 ; H04R31/00 ; H01L41/27 ; H01L41/083 ; H03H9/58 ; H03H3/04
摘要：
A method of manufacturing a stacked thin film piezoelectric filter includes the steps of forming a lower thin film piezoelectric resonator on a substrate, measuring and adjusting a frequency of the lower thin film piezoelectric resonator, forming an acoustic coupling layer on the lower thin film piezoelectric resonator where the frequency of the lower thin film piezoelectric resonator has been adjusted, forming an upper thin film piezoelectric resonator on the acoustic coupling layer, and measuring and adjusting a frequency of the stacked thin film piezoelectric filter.
公开/授权文献
信息查询
