Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US13344757Application Date: 2012-01-06
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Publication No.: US09385137B2Publication Date: 2016-07-05
- Inventor: Mitsuhiro Omura
- Applicant: Mitsuhiro Omura
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-138387 20110622
- Main IPC: H01L21/8239
- IPC: H01L21/8239 ; H01L29/78 ; H01L27/088 ; G11C11/34 ; H01L27/115

Abstract:
According to one embodiment, a method for manufacturing a semiconductor memory device includes forming a stacked body by alternately stacking an insulating film and a conductive film. The method includes forming a trench in the stacked body. The trench extends in one direction and divides the conductive film. The method includes burying a diblock copolymer in the trench. The method includes phase-separating the diblock copolymer into a plurality of first blocks and an insulative second block extending in a stacking direction of the insulating film and the conductive film. The method includes forming a plurality of holes by removing the first blocks. The method includes forming charge accumulation layers on inner surfaces of the holes. And, the method includes forming a plurality of semiconductor pillars extending in the stacking direction by burying a semiconductor material in the holes.
Public/Granted literature
- US20120326223A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2012-12-27
Information query
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